반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

유기태양전지 응용을 위한 원자층 증착 방식 제작의 알루미늄이 도핑 된 ZnO의 전기적, 구조적 특징

Structural and Electrical Properties of Aluminum Doped ZnO Electrodes Prepared by Atomic Layer Deposition for Application in Organic Solar Cells

  • 서인준 (단국대학교 전자공학과) ;
  • 류상욱 (단국대학교 전자공학과)
  • Seo, Injun (Department of Electronics engineering, Dankook University) ;
  • Ryu, Sang Ouk (Department of Electronics engineering, Dankook University)
  • 투고 : 2014.04.10
  • 심사 : 2014.06.20
  • 발행 : 2014.06.30
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초록

Transparent and conducting aluminum-doped ZnO electrodes were fabricated by atomic layer deposition methods. The electrode showed the lowest resistivity of $5.73{\times}10^{-4}{\Omega}cm$ at a 2.5% cyclic layer deposition ratio of Trimethyl-aluminum and Diethyl-zinc chemicals. The electrodes showed minimum resistivity when deposited at a temperature of $225^{\circ}C$. The electrode also showed optical transmittance of about 92% at 300 nm. An organic solar cell made with a 300-nm-thick aluminum-doped ZnO electrode exhibited 2.0% power conversion efficiency.

키워드

참고문헌

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