Journal of the Korean Institute of Illuminating and Electrical Installation Engineers (조명전기설비학회논문지)

The Korean Institute of IIIuminating and Electrical Installation Engineers (한국조명전기설비학회)
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A Study on the Optical Gain Characteristics of a UV Line 250.199nm from Helium-Zinc Discharge Excited by CCRF with Overlapped DC

DC 중첩형 CCRF 여기 헬륨-아연방전에서 자외선 250.199nm의 광이득 특성 연구

  • 최상태 (경주대학교 에너지플랜트학과)
  • Received : 2014.02.27
  • Accepted : 2014.05.26
  • Published : 2014.07.31
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Abstract

On 250.199nm uv-line, witch has the potential to emit as a laser line, from a ccrf-excited He-Zn discharge with overlapped DC was carried out optimization of the discharge parameters and measurement of the optical gain. In this study the optical gain of the 250.199nm uv-line has been optained 4% for the first time. At a rf-power of 400W with the frequency 13.56MHz the optimal He-pressure indicated 2kPa.

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References

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