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입자침전법을 이용한 다결정 산화수은과 산화납 필름의 방사선 유방촬영 장치 적용성 평가

The Evaluation of the Thick Polycrystalline HgO and PbO Films Derived by Particle Sedimentation Method for the Mammographic Application

  • 노시철 (한국국제대학교 방사선학과) ;
  • 박지군 (한국국제대학교 방사선학과) ;
  • 최일홍 (한국국제대학교 방사선학과) ;
  • 정형진 (한국국제대학교 방사선학과) ;
  • 강상식 (한국국제대학교 방사선학과) ;
  • 정봉재 (한국국제대학교 방사선학과)
  • Noh, Si-Cheol (Department of Radiological Science, International University of Korea) ;
  • Park, Ji-Koon (Department of Radiological Science, International University of Korea) ;
  • Choi, Il-Hong (Department of Radiological Science, International University of Korea) ;
  • Jung, Hyoung-Jin (Department of Radiological Science, International University of Korea) ;
  • Kang, Sang-Sik (Department of Radiological Science, International University of Korea) ;
  • Jung, Bong-Jae (Department of Radiological Science, International University of Korea)
  • 투고 : 2014.10.23
  • 심사 : 2014.12.25
  • 발행 : 2014.12.30

초록

본 연구에서는 입자 침전법으로 제작된 HgO와 PbO 기반 영상 센서의 유방촬영 영역에서의 적용 가능성을 조사하였다. 이를 위하여, 다양한 두께에 따른 HgO와 PbO 필름의 물리적 특성과 x선에 대한 양자 효율을 측정하였으며, 몬테카를로 시뮬레이션 결과와 비교 평가하였다. 또한, 입자 침강법을 이용하여 인듐 주석 산화물로 코팅 된 투명 유리기판 위에 대면적 다결정 박막을 제작하였다. 본 연구에서는 단결정의 효율과 비슷한 양자 효율을 얻기 위하여 필름의 두께와 제작 조건을 변화시켜 최적화 하였다. 본 연구의 결과를 기반으로 차후 대면적 a-Si:H 패널에 적합한 대면적 필름의 제작 기술과 최적화 연구가 가능할 것으로 판단된다.

In this study, the morphology and the x-ray quantum efficient of mercury oxide (HgO) and lead oxide (PbO) sensors derived by particle sedimentation method were discussed. In the pursuit of this purpose, we investigated the electrical characteristics and the x-ray quantum efficiency of various thicknesses of HgO and PbO films in mammographic x-ray energy. We have therefore developed a particle-in-binder sedimentation method of fabricating large area polycrystalline films onto transparent glass substrates coated with indium tin oxide. We are currently optimizing the growth method to improve the quantum efficiency with the ultimate goal of obtaining as quantum efficiency close to that of single crystal performance. Our future efforts will concentrate on optimization of large area film growth techniques specifically for deposition on a-Si:H flat panel readout arrays.

키워드

참고문헌

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