DOI QR코드

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Fabrication and Characterization of Optically Encoded Porous Silicon Smart Particles

  • 투고 : 2014.11.25
  • 심사 : 2014.12.25
  • 발행 : 2014.12.31

초록

Optically encoded porous silicon smart particles were successfully fabricated from the free-standing porous silicon thin films using ultrasono-method. DBR PSi was prepared by an electrochemical etch of heavily doped $p^{{+}{+}}$-type silicon wafer. DBR PSi was prepared by using a periodic pseudo-square wave current. The surface-modified DBR PSi was prepared by either thermal oxidation or thermal hydrosilylation. Free-standing DBR PSi films were generated by lift-off from the silicon wafer substrate using an electropolishing current. Free-standing DBR PSi films were ultrasonicated to create DBR-structured porous smart particles. Optical characteristics of porous smart particles were measured by FT-IR spectroscopy. The surface morphology of porous smart particles was determined by FE-SEM.

키워드

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피인용 문헌

  1. Fabrication via Ultrasonication and Study of Silicon Nanoparticles vol.8, pp.3, 2015, https://doi.org/10.13160/ricns.2015.8.3.147
  2. Chemical Sensors Based on Distributed Bragg Reflector Porous Silicon Smart Particles vol.8, pp.1, 2015, https://doi.org/10.13160/ricns.2015.8.1.67