Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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On Nanometer Positioning Control of Ultra-precision Hydrostatic Bearing Guided Feeding Table

초정밀 유정압 베어링 이송 테이블의 나노미터 위치결정 제어에 관한 연구

  • 심종엽 (한국기계연구원 첨단생산장비연구본부 초정밀시스템연구실) ;
  • 박천홍 (한국기계연구원 첨단생산장비연구본부 초정밀시스템연구실) ;
  • 송창규 (한국기계연구원 첨단생산장비연구본부 초정밀시스템연구실)
  • Received : 2013.10.01
  • Accepted : 2013.11.13
  • Published : 2013.12.01
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Abstract

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

Keywords

References

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Cited by

  1. Current Status and Technical Issues of Ultra-precision Machine Tools vol.31, pp.3, 2014, https://doi.org/10.7736/KSPE.2014.31.3.189