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피인용 문헌
- Critical dimension measurement of transparent film layers by multispectral imaging vol.22, pp.14, 2014, https://doi.org/10.1364/OE.22.017370
- Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry vol.18, pp.5, 2014, https://doi.org/10.3807/JOSK.2014.18.5.531