References
- B. Schiedt, L. Auvray, L. Bacri, G. Oukhaled, A. Madouri, E. Bourhis, G. Patriarche, J. Pelta, R. Jede, and J. Gierak, Microelectron. Eng. 87, 1300 (2010). https://doi.org/10.1016/j.mee.2009.12.073
- H. W. Shin, J. C. Chin, H. J. Kim, S. Kim, and J. W. Choi, J. Korean Vac. Soc. 22, 3 (2013).
- Y. H. Ko, M. S. Kim, and J. S. Yoo, J. Korean Vac. Soc. 21, 4 (2012).
- M. J. Vasile, Z. Niu, R. Nassar, W. Zhang, and S. Liu, J. Vac. Sci. Technol. B 15, 2350 (1997). https://doi.org/10.1116/1.589644
- C. H. Chao, S. C. Shen, and J. R. Wu, J. Materials Eng. and Performance 18, 878 (2009). https://doi.org/10.1007/s11665-008-9318-1
- D. S. Kim, Q. H. Park, S. H. Han, and Ch. Lienau, J. Korean Vac. Soc. 12, S1 (2003).
- J. Elliott, I. I. Smolyaninov, N. I. Zheludev, and A. V. Zayats, Optics letters 29, 1414 (2004). https://doi.org/10.1364/OL.29.001414
- A. Krishnan, T. Thio, T. J. Kim, H. J. Lezec, T. W. Ebbesen, P. A. Wolff, J. Pendry, L. Martin-Moreno, and F. J. Garcia-Vidal, Optics Communications 200, 1 (2001).
- A. Degiron, H. J. Lezec, W. L. Barnes, and T. W. Ebbesen, Applied Physics Letters 81, 4327 (2002). https://doi.org/10.1063/1.1526162
- H. F. Ghaemi, T. Thio, D. E. A. Grupp, T. W. Ebbesen, and H. J. Lezec, Physical Review B 58, 6779 (1998). https://doi.org/10.1103/PhysRevB.58.6779
- D. Inoue, A. Miura, T. Nomura, H. Fujikawa, K. Sato, N. Ikeda, D. Tsuya, Y. Sugimoto, and Y. Koide, Appl. Phys. Lett. 98, 093113 (2011). https://doi.org/10.1063/1.3560467
- Q. Chen and D. R. S. Cumming, Opt. Express 18, 14056 (2010). https://doi.org/10.1364/OE.18.014056
- Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. Choi, Adv. Optical Mater. 1, 133 (2013). https://doi.org/10.1002/adom.201200021
- J. Matovic, J. Kettle, E. Brousseau, and N. Adamovic, PROC. 26th In Proc. 26th Internat. Conf. on Microelectronics (MIEL) 1, 104 (2008).
- H. Hosokawa, K. Shimojima, Y. Chino, Y. Yamada, C. E. Wen, and M. Mabuchi, Mater. Sci. Eng. A344, 365 (2003).
- S. H. Kim, H. D. Kim, S. H. Lee, C. M. Park, M. H. Ryoo, G. S. Yeo, J. H. Lee, H. K. Cho, W. S. Han, and J. T. Moon, Proc. of SPIE 5376, 1082 (2004).
- J. Gierak, D. Mailly, G. Faini, J. L. Pelouard, P. Denk, F. Pardo, J. Y. Marzin, A. Septier, G. Schmid, J. Ferre, R. Hydman, C. Chappert, J. Flicstein, B. Gayral, and J. M. Gerard, Microelectronic Engineering 57, 865 (2001).
- D. Angmo, S. A. Gevorgyan, T. T. Larsen-Olsen, R. R. Sondergaard, M. Hosel, M. Jorgensen, R. Gupta, G. U. Kulkarni, and F. C. Krebs, Organic Electronics 13, 984 (2013).
- S. Reyntjens and R. Puers, J. Micromech. Microeng. 11, 287 (2001). https://doi.org/10.1088/0960-1317/11/4/301
- Lucille A. Giannuzzi and F. A. Stevie, Introduction to Focused Ion Beams, (Springer, 2005).
- K. Y. Kim, Plasmonics - Principles and Applications, (InTech, 2012).
- D. N. Zurlev and R. G. Forbes, J. Phys. D: Appl. Phys. 36, L74 (2003). https://doi.org/10.1088/0022-3727/36/17/104
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