Laser Solutions (한국레이저가공학회지)
- Volume 16 Issue 3
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- Pages.27-31
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- 2013
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- 1229-0963(pISSN)
DPSS UV laser projection ablation of 10μm-wide patterns in a buildup film using a dielectric mask
Dielectric 마스크 적용 UV 레이저 프로젝션 가공을 이용한 빌드업 필름 내 선폭 10μm급 패턴 가공 연구
- Sohn, Hyonkee (Department of Laser & Electron Beam Application, KIMM) ;
- Park, Jong-Sig (Applied Optics Team, LEES Optical System Inc.) ;
- Jeong, Su-Jeong (R&D Division, QMC Co., Ltd.) ;
- Shin, Dong-Sig (Department of Laser & Electron Beam Application, KIMM) ;
- Choi, Jiyeon (Department of Laser & Electron Beam Application, KIMM)
- 손현기 (한국기계연구원 광응용기게연구실) ;
- 박종식 ((주)리스광시스템 기술부설연구소) ;
- 정수정 ((주)큐엠씨 연구소) ;
- 신동식 (한국기계연구원 광응용기게연구실) ;
- 최지연 (한국기계연구원 광응용기게연구실)
- Received : 2013.09.12
- Accepted : 2013.09.24
- Published : 2013.09.30
Abstract
To engrave high-density circuit-line patterns in IC substrates, we applied a projection ablation technique in which a dielectric (
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