JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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A Wireless Intraocular Pressure Sensor with Variable Inductance Using a Ferrite Material

  • Kang, Byungjoo (School of Electronic Engineering, College of Information Technology, Soongsil University) ;
  • Hwang, Hoyong (School of Electronic Engineering, College of Information Technology, Soongsil University) ;
  • Lee, Soo Hyun (Nano-Bio Research Center, Korea Institute of Science and Technology) ;
  • Kang, Ji Yoon (Nano-Bio Research Center, Korea Institute of Science and Technology) ;
  • Park, Joung-Hu (School of Electrical Engineering, College of Engineering, Soongsil University) ;
  • Seo, Chulhun (School of Electronic Engineering, College of Information Technology, Soongsil University) ;
  • Park, Changkun (School of Electronic Engineering, College of Information Technology, Soongsil University)
  • Received : 2012.12.25
  • Accepted : 2013.05.07
  • Published : 2013.08.31
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Abstract

A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

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References

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