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The Korean Institute of Electrical Engineers (대한전기학회)
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Humidity Sensing Characteristics of TiO2 Thin Films Fabricated by R.F.Sputtering Method

R.F.스퍼터링법에 의해 제작된 TiO2 박막의 습도감지특성

  • You, Do-Hyun (Dept. of Electrical Engineering, Shin Ansan University)
  • Received : 2013.02.26
  • Accepted : 2013.06.05
  • Published : 2013.07.01
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Abstract

$TiO_2$ thin films are fabricated using R.F.sputtering method. $TiO_2$ thin films are coated on $Al_2O_3$ substrate printed IDE(interdigitated electrode). Impedance of thin films decreases according to increase relative humidity and it increases according to decrease measuring frequency. When substrate temperature is room temperature, impedance of thin films is from 45.68[MHz] to 37.76[MHz] within the limits from 30[%RH] to 75[%RH] at 1[kHz]. Whereas when substrate temperature is 100[$^{\circ}C$], impedance of thin films is from 692[kHz] to 539[kHz] within the limits from 30[%RH] to 75[%RH] at 1[kHz]. Impedance variation of thin films is bigger in low frequency regions than in high frequency regions. When substrate temperature is 100[$^{\circ}C$], impedance of thin films is lower than that of room temperature.

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References

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