Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
권호 표지

A Study on the Deposition Conditions on Joint Strength of Polyimide Substrate and ZnO Thin Film

Polyimide 기판과 ZnO 박막의 접합강도에 미치는 증착조건에 관한 연구

  • Hur, Jang-Wook (Intelligent Mechanical Engineering, Kumoh Institute of Technology)
  • Published : 2013.04.30
⟨ Previous Next ⟩

Abstract

The influence of internal stress and joint strength(shear, tensile) according to the deposition conditions was investigated by the Polyimide substrate and ZnO thin film. Deposition thickness and temperature affect the internal stress and the internal stress was minimum at the 60nm and $200^{\circ}C$ of the deposition conditions. Tensile strength is large at the deposition condition that shear strength is large and the shear strength was about 50% of the tensile strength. The shear strength and tensile strength were large at deposition condition that internal stress was small. Crack occurred near the joint interface of Polyimide substrate and progressed along the interface until the final fracture.

Keywords

References

  1. Lee, Y. J., Kim, T. Y., Lee, K. R. and Yang, I. S., "Humidity Dependence of the Residual Stress of Diamond-like Carbon Film", J. of the Korean Vacuum Society, Vol. 13, No. 4, pp. 157-163, 2004.
  2. Kelires, P. C., "Intrinsic Stress and Stiffness Variations in Amorphous Carbon", Diamond and Related Materials, Vol. 10, pp. 139-144, 2001. https://doi.org/10.1016/S0925-9635(00)00460-X
  3. Cammarata, R. C. and Trimble, T. M., "Surface Stress Model for Intrinsic Stresses in Thin Films", J. Mater. Res., Vol. 15, No. 11, pp. 2468-2474, 2000. https://doi.org/10.1557/JMR.2000.0354
  4. Kim, H. T., Kim, S. J., Han, S. H., Kim, H. J., and Kang, I., K., "The Effect of Internal Stress on the Soft Magnetic properties of Permalloy Thin Films", J. of Korean Magnetics Society, Vol. 5, No. 5, pp. 533-537, 1995.
  5. Choi, S. K., Jung, D. Y. and Choi, H. M., "Control of Residual Stress in Diamond Film Fabricated by Hot Filament CVD", J. of the Korean Ceramic Society, Vol. 32, No. 7, pp. 793-798, 1995.
  6. Kim, H. T. and Kim, S. J., "The Effect of Internal Stress on the Soft Magnetic Properties of Permalloy Thin Films", J. of the Korean Magnetics Society, Vol. 5, No. 5, pp. 533-537, 1995.
  7. Shim, J. J., Han, G. J., Kim, T. H., Ahn, S. C., Han, D. S. and Lee S. W., "Evaluation of the Residual Stress on the Multi-layer Thin Film of Different Materials", J. of the Korean Society of Precision Engineering, Vol. 20, No. 9, pp. 135-141, 2003.
  8. Hur, J. W. and Choi, S. D. "A Study on the Residual Stress Analysis of a-Si Thin Film Solar Cell", J. of the Korean Society of manufacturing Process Engineers, in preparation.
  9. Choi, H. W., Lee, K. R., Wang, R. and Oh, K. H., "Stability and Adhesion of Diamond-like Carbon Film under Micro-tensile Test Condition", J. of the Korean Vacuum Society, Vol. 13, No. 4, pp. 175-181, 2004.
  10. Lee, C. R., Park, J. H., Leem, J. Y., Kim, K. S. and Chun, B. S., "The Interface Adhesion of Diamond Thin Film Grown on Si by EACVD", J. of the Korean Vacuum Society, Vol. 2, No. 3, pp. 374-383, 1993.
  11. Stoney G. G, Proc, R. Society, London, A82, pp. 172. 1909.
  12. Yoon, S. G., Kim, Y. T., Kim, H. K., Kim, M. J., Lee, H. M. and Yoon, D. H., "Change of Refractive Index and Residual Stresses of Ta2O5 Thin Film Prepared by Dual Ion Beam Sputtering Deposition As the Substrate Temperature and Assist Ion Beam Energy", J. of the Korean Ceramic Society, Vol. 42, No. 1, pp. 28-32, 2005. https://doi.org/10.4191/KCERS.2005.42.1.028