전기학회논문지P (The Transactions of the Korean Institute of Electrical Engineers P)

  • 제62권2호
  • /
  • Pages.95-97
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  • 2013
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  • 1229-800X(pISSN)
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  • 2586-7792(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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CaTiO3 박막의 감습특성

Humidity Sensitive Characteristics of CaTiO3 Thin Films

  • 투고 : 2013.01.28
  • 심사 : 2013.03.05
  • 발행 : 2013.06.01
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초록

$CaTiO_3$ thin films using silk screen printing technology were fabricated and their humidity sensitive characteristics have been investigated. The specimens were sintered at $1000^{\circ}C$, $1050^{\circ}C$, $1100^{\circ}C$ for 1 hour and the best humidity sensitivity was shown in the specimens sintered at $1000^{\circ}C$. The humidity sensitivity decreased with increasing measuring frequencies and was stable at different abient temperatures. Hysteresis of impedance variation with increasing and decreasing relative humidity were negligible.

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참고문헌

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