한국진공학회지 (Journal of the Korean Vacuum Society)

한국진공학회 (The Korean Vacuum Society)
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PSG/SiO2 보호막 처리된 Al-1%Si 박막배선에서의 Sodium과 수분 게터링에 관한 연구

A Study on the Sodium and Moisture Gettering in PSG/SiO2 Passivated Al-1%Si Thin Film Interconnections

  • 김진영 (광운대학교 전자재료공학과)
  • Kim, Jin Young (Department of Electronic Materials Engineering, Kwangwoon University)
  • 투고 : 2013.03.21
  • 심사 : 2013.05.02
  • 발행 : 2013.05.30
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초록

PSG/$SiO_2$ 보호막 처리된 Al-1%Si 박막배선 내 sodium (Na)과 수분($H_2O$) 게터링(gettering) 현상을 측정, 분석하였다. PSG/$SiO_2$ 보호막과 Al-1%Si 박막을 상압CVD (APCVD: atmosphere pressure chemical vapor deposition)법과 DC 마그네트론 스퍼터로 각각 증착하였고, 이차이온 질량분석기(SIMS: secondary ion mass spectrometry)를 이용한 깊이분포측정(depth profiling) 분석을 통해 PSG/$SiO_2$ 보호막으로부터 Al-1%Si 박막배선 층까지의 sodium과 수분 등 성분들의 분포를 확인하였다. Sodium과 수분 피크 모두 Al-1%Si 박막배선 내부보다는 막 간 계면에서 강하게 나타났다. PSG와 $SiO_2$ 보호막 계면에서는 sodium 피크는 관찰되었지만 수분 피크는 관찰되지 않았다.

The sodium (Na) and moisture ($H_2O$) gettering phenomena were measured and analyzed in PSG/$SiO_2$ passivated Al-1%Si thin film interconnections. PSG/$SiO_2$ passivation and Al-1%Si thin films were deposited by using APCVD (atmosphere pressure chemical vapor deposition) and DC magnetron sputter techniques, respectively. SIMS (secondary ion mass spectrometry) depth profiling analysis was used to determine the distribution of sodium and moisture throughout the PSG/$SiO_2$ passivated Al-1%Si thin film interconnections. Both sodium and moisture peaks were observed strongly at the interfaces between layers rather than within the Al-1%Si thin film interconnections. Sodium peaks were observed at the interface between PSG and $SiO_2$ passivations, while moisture peaks were not observed.

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참고문헌

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피인용 문헌

  1. A Study on the Potassium Gettering in Al-1%Si/SiO2/PSG Multilevel Thin Films vol.48, pp.5, 2015, https://doi.org/10.5695/JKISE.2015.48.5.233
  2. Analysis of the Na Gettering in PSG/SiO2/Al-1%Si Multilevel Thin Films using XPS and SIMS vol.49, pp.5, 2016, https://doi.org/10.5695/JKISE.2016.49.5.467