자기 부상 안내 기구의 불연속 특성 보상 방법

Compensation of the Discontinuous Properties of the Guide System using Magnetic Levitation

These days, the quality of goods is required to improve in the process of manufacturing the semiconductor through the short working hours and clean transportation. The non-contact transport device using magnetic levitation can be a solution in the manufacturing process. The non-contact transport device, using electromagnetic actuation, is the system that can actually transport them by only using attraction force from the electromagnetic source without authentic contact. Moreover, the system using electromagnetic force has a substantial number of benefits ranging from unrestricted design to unlimited expansion. Especially, the price is competitive. The non-contact transport device, using electromagnetic force, has another merits in controlling by giving the same amount of attraction force to ferromagnetic body. By controlling the currents given to coil, the operator is able to decide the direction of the transportation. In order to design the optimal system, we implemented five different things such as the presence of the links below the electromagnetic, the electromagnet changes due to coupling method, the change according to the thickness of the links below electromagnet, due to changes in between electromagnetic distance direction, and the size of the current. Through simulations and the optimum design, it seems to control easily and figure out the exact size of power. It might definitely be the non-contact transport that can sharply reduce tiny scratches and particles in the process of manufacturing the semiconductor.