Current Photovoltaic Research
- Volume 1 Issue 2
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- Pages.97-102
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- 2013
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- 2288-3274(pISSN)
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- 2508-125X(eISSN)
DOI QR Code
Influence of Heat Treatment on the Structural, Electrical and Optical Properties of Aluminum-Doped Zinc Oxide Thin Films Prepared by Magnetron Sputtering
- Jung, Sung Hee (Department of Chemical engineering, Inha University) ;
- Kong, Seon Mi (Department of Chemical engineering, Inha University) ;
- Chung, Chee Won (Department of Chemical engineering, Inha University)
- Received : 2013.11.20
- Accepted : 2013.12.09
- Published : 2013.12.31
Abstract
Aluminum-doped zinc oxide (AZO) thin films were prepared by dc magnetron sputtering at room temperature and the effect of heat treatment on the structural, electrical and optical properties of the films were examined. As the annealing temperature and time increased, the resistivity decreased and the transmittance improved. All AZO films had c-axis oriented (002) plane of ZnO, regardless of the annealing process employed. As the annealing temperature and time increased, the crystallinity of AZO thin films increased due to the formation of a new ZnO phase in which Al was substituted for Zn. However, at the high annealing temperature of