과제정보
연구 과제 주관 기관 : Korea Institute of Industrial Technology (KITECH), National Research Foundation of Korea (NRF)
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We investigated the effects of Au eutectic reaction on Si thin film growth by hot wire chemical vapor deposition. Small SiC and Si nano-particles fabricated through a wet etching process were coated and biased at 50 V on micro-textured Si p-n junction solar cells. Au thin film of 10 nm and a Si thin film of 100 nm were then deposited by an electron beam evaporator and hot wire chemical vapor deposition, respectively. The Si and SiC nano-particles and the Au thin film were structurally embedded in Si thin films. However, the Au thin film grew and eventually protruded from the Si thin film in the form of Au silicide nano-balls. This is attributed to the low eutectic bonding temperature (
연구 과제 주관 기관 : Korea Institute of Industrial Technology (KITECH), National Research Foundation of Korea (NRF)