Journal of the Korean Applied Science and Technology (한국응용과학기술학회지)

The Korean Society of Applied Science and Technology (한국응용과학기술학회)
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Large scale synthesis of the geometrically controlled carbon coils using $Al_2O_3$ ceramic boat for the supporting substrate

산화알루미늄 세라믹 보트 기판을 이용한 탄소마이크로 코일의 대량 합성

  • Kim, Sung-Hoon (Department of Engineering in Energy & Applied Chemistry, Silla University)
  • 김성훈 (신라대학교 에너지응용화학과)
  • Received : 2013.08.10
  • Accepted : 2013.09.26
  • Published : 2013.09.30
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Abstract

Carbon coils could be synthesized using $C_2H_2/H_2$ as source gases and $SF_6$ as an incorporated additive gas under thermal chemical vapor deposition (CVD) system. Prior to the carbon coils deposition reaction, two kinds of samples having different combination of Ni catalyst and substrate were employed, namely, a commercially-made $Al_2O_3$ ceramic boat with Ni powders and a commercially-made $Al_2O_3$ substrate with Ni layer. By using a commercially-made $Al_2O_3$ ceramic boat, the synthesis of carbon coils could be enhanced as much as 10 times higher than that of $Al_2O_3$ substrate. Furthermore, the dominant formation of the microsized carbon coils could be obtained by using $Al_2O_3$ ceramic boat. The surface roughness of the supporting substrate of $Al_2O_3$ ceramic boat was understood to be associated with the large scale synthesis of carbon coils as well as the dominant formation of the larger-sized, namely the microsized carbon coils.

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References

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