한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제30권3호
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  • Pages.324-330
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  • 2013
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
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대형 광학계 연마 장비에 의한 대구경 반사경의 최적 근사 구면 제조 방법에 관한 연구

An Optical Surfacing Technique of the Best-fitted Spherical Surface of the Large Optics Mirror with Ultra Precision Polishing Machine

  • 송창규 (한국기계연구원 첨단생산장비연구본부) ;
  • 김경호 (한국기계연구원 첨단생산장비연구본부) ;
  • 황주호 (한국기계연구원 첨단생산장비연구본부) ;
  • 김병섭 (한국기계연구원 첨단생산장비연구본부) ;
  • 박천홍 (한국기계연구원 첨단생산장비연구본부) ;
  • 이호철 (한밭대학교 기계공학과)
  • Song, Chang Kyu (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Khim, Gyungho (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Hwang, Jooho (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Kim, Byung Sub (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Park, Chun Hong (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Hocheol (Department of Mechanical Engineering, Hanbat Nat'l Univ.)
  • 투고 : 2012.11.07
  • 심사 : 2013.01.18
  • 발행 : 2013.03.01
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초록

This paper describes a novel method to surface large optics mirror with an extremely high hardness, which could replace the high cost of the repetitive off-line measurement steps and the large ultra-precision grinding machine with ultra-positioning control of 10 nm resolution. A lot of diamond pellet to be attached on the convex aluminum base consists of a grinding tool for the concave large mirror, and the tool was pressured down on the large mirror blank. The tool motion at an interval on the spiral path was controlled with each feed rate as the dwell time in the conventional computer-controlled polishing. The shape to be surfaced was measured directly by a touch probe on the machine without any separation of the mirror blank. Total 40 iterative steps of the surfacing and measurement could demonstrate the form error of RMS $7.8{\mu}m$, surface roughness of Ra $0.2{\mu}m$ for the mirror blank with diameter of 1 m and spherical radius of curvature of 5400 mm.

키워드

참고문헌

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