조명전기설비학회논문지 (Journal of the Korean Institute of Illuminating and Electrical Installation Engineers)

  • 제27권2호
  • /
  • Pages.77-83
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  • 2013
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  • 1229-4691(pISSN)
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  • 2287-5034(eISSN)
한국조명전기설비학회 (The Korean Institute of IIIuminating and Electrical Installation Engineers)
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상압 플라즈마의 광 방출 스펙트럼 특성조사에 관한 연구

The Study on Emission Spectrum Characteristics of Atmosphere Pressure Plasma

  • 박성진 (한국폴리텍대학 대구캠퍼스 스마트전기과)
  • Park, Sung-Jin (Department of Smart Electrical Engineering, Daegu campus of KOREA Polytechnic)
  • 투고 : 2012.11.15
  • 심사 : 2012.12.26
  • 발행 : 2013.02.28
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초록

In this study, we aimed to determine the optical properties of the plasma used for the dry cleaning method. The optical properties of the atmospheric pressure plasma device were measured through the degree of ionization of hydrogen or nitrogen gas by ionized atmospheric gas. The degree of ionization of hydrogen or nitrogen is closely associated with surface modification. We observed through our experiments that argon gas, an atmospheric gas, caused an increase in the ionization of nitrogen gas, which has similar ionization energy. This type of increase in nitrogen gas ions is believed to affect surface modification. The results of our study show that the pressure of argon gas and the partial pressure of argon and nitrogen gases lead to different results. This important result shows that argon ions can affect the ionization of nitrogen gas.

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참고문헌

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