Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Global Stage of Reproducibility Experiment for Single Point Diamond Turning

초정밀 선삭가공을 위한 글로벌스테이지의 재현성 실험

  • Park, Dae-Kwang (Dept. of Advanced Parts & Materials, Graduate School of Chosun University) ;
  • Kwak, Nam-Su (Dept. of Advanced Parts & Materials, Graduate School of Chosun University) ;
  • Kwon, Dae-Ju (Iksan Campus of KOREA PLOYTECHNIC) ;
  • Kim, Jae-Yeol (Dept. of Mechatronics Engineering, Chosun University)
  • Received : 2013.11.07
  • Accepted : 2013.11.26
  • Published : 2013.12.15
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Abstract

With conventional positioning apparatus, it is very difficult to simultaneously achieve the desired driving range and precision at the sub-micrometer level. Generally, lead screw and friction drive, etc., have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

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References

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