ETRI Journal

  • 제34권6호
  • /
  • Pages.970-973
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  • 2012
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  • 1225-6463(pISSN)
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  • 2233-7326(eISSN)
한국전자통신연구원 (Electronics and Telecommunications Research Institute)
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DOI QR코드

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Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors

  • Ahn, SeongDeok (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Kang, Seong Youl (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Oh, Ji Young (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Suh, Kyung Soo (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Cho, Kyoung Ik (Convergence Components & Materials Research Laboratory, ETRI) ;
  • Koo, Jae Bon (Convergence Components & Materials Research Laboratory, ETRI)
  • 투고 : 2012.06.19
  • 심사 : 2012.07.27
  • 발행 : 2012.12.31
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초록

In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are $0.1cm^2/Vs$ and $10^6$, respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.

키워드

참고문헌

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피인용 문헌

  1. Patterned PPy Polymer and PPy/Ag Nanocomposites Thin Films by Photo-DLICVD vol.46, pp.None, 2012, https://doi.org/10.1016/j.phpro.2013.07.044