한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제22권5호
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  • Pages.213-217
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  • 2012
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
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Geometry variation for as-grown carbon coils under the minimized sulfur additive condition

  • Lee, Seok-Hee (Department of Science Education, Busan National University of Education) ;
  • Kim, Sung-Hoon (Department of Engineering in Energy & Applied Chemistry, Silla University)
  • 투고 : 2012.09.17
  • 심사 : 2012.10.12
  • 발행 : 2012.10.31
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초록

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases under thermal chemical vapor deposition system. By the incorporation of $SF_6$ additive in cyclic modulation manner, the dominant formation of the nanosized carbon coils could be achieved with maintaining the minimized sulfur additive amount. The geometry variation of the as-grown carbon coils, such as linear type, microsized coil type, wavelike nanosized coil type, and nanosized coil type, were investigated according to the different cyclic modulation manner of $SF_6$ flow. $SF_6$ gas incorporation develops the coil-type geometry. Furthermore, the higher flow rate of $SF_6$ gas increased the amount of the nanosized carbon coils. The slightly increased etching ability by $SF_6$ addition seems to be the cause for these results.

키워드

참고문헌

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