정보저장시스템학회논문집 (Transactions of the Society of Information Storage Systems)

  • 제8권2호
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  • Pages.44-49
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  • 2012
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  • 1738-6845(pISSN)
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  • 2288-2022(eISSN)
정보저장시스템학회 (The Society of Information Storage Systems)
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Refractive media flatness measurement by phase shifting digital holography

  • 투고 : 2012.09.10
  • 심사 : 2012.09.20
  • 발행 : 2012.09.25
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초록

We measured the surface flatness of both sides for refractive media using the transmitted digital holography method. To enhance the accuracy of the result, phase-shifting system was used. With two different phase modulation of reference beam, the phase profile of object can be easily obtained. Thus, we proposed the surface measurement method which can measure large area fast, compared with conventional methods. To guarantee the reliability of obtained result, we compared with Zygo measurement system. With the proposed method, the surface flatness of $3.45{\mu}m$ resolution could be obtained.

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참고문헌

  1. K. Curtis, L. Dhar, A. Hill, W. Wilson, and M. Ayres, 2010, "Holographic Data Storage: From Theory to Practical Systems,"
  2. H. Coufal, D. Psaltis, and G. T. Sincerbox,2000, "Holographic data storage, Springer series in optical sciences"
  3. J. W. Goodman and R. W. Lawrence, 1967, "Digital Image Formation from Electronically Detected Holograms," Applied Physics Letters, Vol.11, pp. 77-79 https://doi.org/10.1063/1.1755043
  4. Dipankar Bhattacharyya, Ayan Ray, Bibhas K. Dutta, and Pradip N. Ghosh, 2002, "Direct measurement on transparent plates by using Fizeau interferometry," Optics & Laser Technology, Vol.34, pp. 93-96 https://doi.org/10.1016/S0030-3992(01)00085-8
  5. Ichirou Yamaguchi, Sohgo Ohta, and Jun-ichi Kato, 2001, "Surface contouring by phase-shifting digital holography," Optics and Lasers in Engineering, Vol.36, pp. 417-428 https://doi.org/10.1016/S0143-8166(01)00069-0
  6. Osuk Kwon, J. C. Wyant, and C. R. Hayslett, 1980, "Rough surface interferometry at 10.6 ${\mu}m$," Applied Optics, Vol.19, pp.1862-1869 https://doi.org/10.1364/AO.19.001862
  7. Myung K. Kim, 2011, "Digital Holographic Microscopy: Principles, Techniques, and Applications," Springer
  8. I. Yamaguchi and T. Zhang, 1997, "Phase-shifting digital holography," Optics letters, Vol.22, pp. 1268-1270 https://doi.org/10.1364/OL.22.001268
  9. Yasuhiro Awatsuji, Tatsuki Tahara, Atsushi Kaneko, Takamasa Koyama, Kenzo Nishio et al., 2008, "Parallel two-step phase-shifting digital holography", Applied Optics, Vol.47, No. 19 pp. D183-D189 https://doi.org/10.1364/AO.47.00D183