Transactions of the Society of Information Storage Systems (정보저장시스템학회논문집)

The Society of Information Storage Systems (정보저장시스템학회)
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Refractive media flatness measurement by phase shifting digital holography

위상천이 디지털 홀로그래피를 이용한 평판의 표면 평면도 측정

  • Received : 2012.09.10
  • Accepted : 2012.09.20
  • Published : 2012.09.25
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Abstract

We measured the surface flatness of both sides for refractive media using the transmitted digital holography method. To enhance the accuracy of the result, phase-shifting system was used. With two different phase modulation of reference beam, the phase profile of object can be easily obtained. Thus, we proposed the surface measurement method which can measure large area fast, compared with conventional methods. To guarantee the reliability of obtained result, we compared with Zygo measurement system. With the proposed method, the surface flatness of $3.45{\mu}m$ resolution could be obtained.

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References

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