Laser Solutions (한국레이저가공학회지)
- Volume 15 Issue 2
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- Pages.6-10
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- 2012
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- 1229-0963(pISSN)
Fabrication and improvement of diffraction grating with femtosecond and $CO_2$ laser
레이저를 이용한 회절격자 제작 및 효율 향상 연구
- Choi, Hun-Kook (Advanced Photonics Research Institute, GIST) ;
- Sohn, Ik-Bu (Advanced Photonics Research Institute, GIST) ;
- Noh, Young-Chul (Advanced Photonics Research Institute, GIST) ;
- Kim, Jin-Tae (Department of Photonic Eng., CHOSUN Univ.)
- 최훈국 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
- 손익부 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
- 노영철 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
- 김진태 (조선대학교 광기술공학과 레이저응용연구실)
- Received : 2012.06.07
- Accepted : 2012.06.26
- Published : 2012.06.30
Abstract
We fabricated the diffraction grating on the surface of fused silica glass using a femtosecond laser. The grooves of diffraction grating has a lot of micro crack and debris result in reduced diffraction efficiency. So, we polished the diffraction grating with