Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Micro Polishing Force Control of the Polishing Machine with the Airbag Tool

에어백 공구 기반의 광학 연마 장치의 미세 힘 제어 구현

  • 이호철 (한밭대학교 기계공학과) ;
  • 이창은 (한밭대학교 기계공학부) ;
  • 제태진 (한국기계연구원 나노융합기계연구본부)
  • Received : 2012.05.15
  • Accepted : 2012.07.14
  • Published : 2012.10.15
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Abstract

In this paper, the polishing force monitoring and the control method were implemented for the polishing machine with the airbag tool. Airbag tool has been known to be adaptable to the curvature variation such as the aspherical and the free-form surface. However, it was necessary to control the tool movement of vertical axis also because of the table rotational wobble and vibration. To solve it by the polishing force control, we installed another stepping motor to the z-axis. And the polishing force was measured with the load cell and controlled by the PID Labview controller. A few hundreds gram of the polishing force were well controlled under 0.8 second of the response time and 5% variation. An experiment was done to clean the edge burrs of the micro channel structure of width $87{\mu}m$ using the polishing force control.

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References

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Cited by

  1. Rotational Stability and Lubrication State Evaluation of the Polishing Head for High Speed Polishing vol.25, pp.4, 2016, https://doi.org/10.7735/ksmte.2016.25.4.301