한국산학기술학회논문지 (Journal of the Korea Academia-Industrial cooperation Society)

  • 제13권7호
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  • Pages.3160-3164
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  • 2012
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  • 1975-4701(pISSN)
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  • 2288-4688(eISSN)
한국산학기술학회 (The Korea Academia-Industrial cooperation Society)
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스퍼터링에 의한 Low-k 박막의 특성

CharacteristicProperties of Low-k Thin Film Deposited by Sputtering

  • Oh, Teresa (Division of Semiconductor, Choenju University)
  • 투고 : 2012.04.16
  • 심사 : 2012.07.12
  • 발행 : 2012.07.31
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초록

저온공정을 위해 스퍼터 방법에 의해 SiOC 박막을 증착하였으며, SiOC 박막 위에 투명전극을 제작하기 위해서 AZO박막과 ZnO 박막을 증착하였다. 박막의 광학적 특성은 PL 분석기와 스펙트라포토미터를 이용하였다. SiOC 박막은 n-type Si 위에 증착하였을 때 증착조건에 따라서 방사 효과가 다양하게 나타났으며, 두꺼운 박막에서 blue shit 현상이 나타났다. SiOC/Si 박막 위에 AZO 박막을 증착할 경우 빛의 흡수영역이 넓어졌다. 이러한 특성은 태양전지의 투명전극을 만들 경우 효율을 높일 수 있게 된다.

To obtain available process at low temperature, SiOC thin film was prepared with various flow rates by using the rf magnetron sputtering, and AZO thin film was also deposited on SiOC film by rf magnetron sputtering system. The optical electrical properties of the SiOC film and SiOC/AZO were analyzed by the uv visible spectrometer and PL spectra. SiOC film on n type Si showed various type emission according to the deposition condition. The SiOC film showed the blue shift with increasing the thickness in PL spectra. AZO/SiOC/Si film had a broad emission characteristic, which is enhanced the efficiency in solar cell.

키워드

참고문헌

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