Journal of Industrial Technology (산업기술연구)

Kangwon National University, Institute of Industrial Technology (강원대학교 산업기술연구소)
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A study on thermal behavior of Diamond-like carbon film

Diamond-like carbon film의 열적거동에 관한 연구

  • 조광래 (한국폴리텍III대학 원주캠퍼스 산업설비학과) ;
  • 노정연 (강원대학교 대학원 신소재공학과) ;
  • 소명기 (강원대학교 신소재공학과)
  • Published : 2012.02.29
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Abstract

Diamond-like carbon(DLC) thin films with interlayer were deposited on silicon substrate using a reactive sputtering method. The thermal stability of the films was investigated by annealing the films for 1hr in air in the range of 100 to $500^{\circ}C$. The $I_D/I_G$ ratio increased with increasing temperature as related to the $sp^3-to-sp^2$transition. Accordingly, G-position shifting started from $150^{\circ}C$ in the DLC films and from $270^{\circ}C$ in the a-Si/DLC films. Moreover, in the case of the a-Si/DLC films the film still observed even after annealing at $500^{\circ}C$. The thermal stability of the reactive sputtered DLC films appeared to be improved by the a-Si interlayer.

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