한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제11권5호
  • /
  • Pages.99-103
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  • 2012
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  • 1598-6721(pISSN)
  • /
  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
권호 표지

엑시머 레이저를 이용한 파이렉스 유리의 미세 구멍 가공

The Experimental Study in the Micro Drilling of Excimer Laser on Pyrex Glass

  • 이철재 (동아대학교 대학원 기계공학과) ;
  • 김하나 (동아대학교 대학원 기계공학과) ;
  • 정윤상 (동아대학교 대학원 기계공학과) ;
  • 전찬봉 (동아대학교 대학원 기계공학과) ;
  • 박영철 (동아대학교 기계공학과) ;
  • 강정호 (동아대학교 기계공학과)
  • 발행 : 2012.10.31
⟨ 이전 논문 다음 논문 ⟩

초록

Presently, A glass is widely used in telecommunication system, optoelectronic devices and micro electro mechanical systems. Micro drilling of glass using the laser can save processing cost and improve the accuracy. This paper experiments micro drilling using KrF excimer laser on the pyrex glass of $500{\mu}m$ thickness. We have experiment to find out optimum laser machining conditions of micro drilling of glass and ablation depth and influence by processing parameter suc'h pulse repetition rate, energy density and number of pulses. Pulse repetition rate don't influence ablation depth at the micro drilling of pyrex glass. Energy density influence micro drilling of parallelism and maximum thickness that can be drilled. Ablation depth is most influenced by number of pulses.

키워드

참고문헌

  1. Park, B. J., Choi, Y. J. and Chu, C. N., "Prevention of Exit Crack in Micro-drilling of Soda-lime Glass", J. KSPE, pp. 1052-1055, 2001.
  2. Kang, G. H., Roh, Y. R. and Kim, G. M., "Fabrication of Micro-Channel with Embedded Electrode for Impedance Measurement", KSMPE, Vol. 5, No. 3, pp. 11-16, 2006.
  3. Bien, D. C., Mitchell, S. J. N. and Gamble, H. S., "Fabrication and characterization of a micromachined passive valve", J. Micromech. Microeng., Vol. 13, No. 5, pp. 557-562, 2003. https://doi.org/10.1088/0960-1317/13/5/305
  4. Bu, M., Melvin, T., Ensell, G. J., Wikinson, J. S., Evans, A. G. R., "A new masking technology for deep glass etching and its microfluidic application", Sens. Actuator A: Phys., Vol. 115, pp. 476-482.
  5. Yoo, J. H., "A principle and phenomena of laser micro processing", Proceedings of KIEE. Vol. 50, No. 5, 2001.
  6. http://www.coherent.co.kr
  7. Baumgart, P., Krajnovich, D. J., Nquyen, T. A. and Tam, A. C., "A new laser texturing techniques for high performance magnetic disk drives", IEEE Transactions on Magnetics, Vol. 31, No. 6, pp. 2946-2951, 1995. https://doi.org/10.1109/20.490199
  8. Tam, A. C., Pour, I. K., Nguyen, T. A., Krajnovich, D. J., Baumgart, P., Bennett, T. and Grigoropoulos, C., "Experimental and theoretical studies of bump formation during laser texturing of Ni-P disl substrates", IEEE Transactions on Magnetics, Vol. 32, No. 5, pp. 3771-3773, 1996. https://doi.org/10.1109/20.538831
  9. Crafer R. C. and Oakley, P. J., "Laser processing in manufacturing", Chapman, 1993.
  10. Bernd K., Horst E., Udo L. and Thomas K., " Drilling of Glass by Excimer Laser Mask Projection Technique", Journal of Laser Applications, Vol. 12, No. 5, pp. 189-193, 2000. https://doi.org/10.2351/1.1309553