IE interfaces (산업공학)

Korean Institute of Industrial Engineers (대한산업공학회)
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One-class Classification based Fault Classification for Semiconductor Process Cyclic Signal

단일 클래스 분류기법을 이용한 반도체 공정 주기 신호의 이상분류

  • Cho, Min-Young (School of Industrial Management Engineering, Korea University) ;
  • Baek, Jun-Geol (School of Industrial Management Engineering, Korea University)
  • 조민영 (고려대학교 산업경영공학과) ;
  • 백준걸 (고려대학교 산업경영공학과)
  • Received : 2011.12.16
  • Accepted : 2012.03.03
  • Published : 2012.06.01
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Abstract

Process control is essential to operate the semiconductor process efficiently. This paper consider fault classification of semiconductor based cyclic signal for process control. In general, process signal usually take the different pattern depending on some different cause of fault. If faults can be classified by cause of faults, it could improve the process control through a definite and rapid diagnosis. One of the most important thing is a finding definite diagnosis in fault classification, even-though it is classified several times. This paper proposes the method that one-class classifier classify fault causes as each classes. Hotelling T2 chart, kNNDD(k-Nearest Neighbor Data Description), Distance based Novelty Detection are used to perform the one-class classifier. PCA(Principal Component Analysis) is also used to reduce the data dimension because the length of process signal is too long generally. In experiment, it generates the data based real signal patterns from semiconductor process. The objective of this experiment is to compare between the proposed method and SVM(Support Vector Machine). Most of the experiments' results show that proposed method using Distance based Novelty Detection has a good performance in classification and diagnosis problems.

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References

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