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교류 펄스 전압을 이용한 평판형 대기압 유전격벽방전 플라즈마의 특성 분석

A Study on the Dielectric Barrier Discharges Plasmas of Flat Atmospheric Pressure Using an AC Pulse Voltage

  • 이종봉 (부산대학교 전자전기공학과) ;
  • 하창승 (부산대학교 전자전기공학과) ;
  • 김동현 (부산대학교 전자전기공학과) ;
  • 이호준 (부산대학교 전자전기공학과) ;
  • 이해준 (부산대학교 전자전기공학과)
  • 투고 : 2011.12.22
  • 심사 : 2011.12.30
  • 발행 : 2012.05.01

초록

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

키워드

참고문헌

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피인용 문헌

  1. The Analysis of DC Plasmas Characteristics on SFSF6and N2Mixture Gases vol.63, pp.10, 2014, https://doi.org/10.5370/KIEE.2014.63.10.1485