참고문헌
- Lee, Y.H., "Supply Chain Model for the Semiconductor Industry of Global Market," Journal of Systems Integration, Vol.10, No.3 (2001), pp.189-206. https://doi.org/10.1023/A:1011297726485
- Chung, S.L. and M. Jeng, "Fabulous MESs and C/Cs:An overview of semiconductor fab automation," IEEE Robotics and Automation Magazine, (2004), pp.8-18.
- Campbell, P.L. and G. Laitinen, "Overhead Intrabay Automation and Microstocking-a virtual fab case study," Proceedings of IEEE/SEMI Advanced Semiconductor Manufacturing Conference, (1997), pp.368-372.
- Weiss, M., "300 Fab Automation Technology options and selection criteria," IEEE/SEMI Advanced Semiconductor Manufacturing Conference, (1997), pp.373-379.
- Cardarelli, G., P.M. Pelagagge, and A. Granito, "Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab," Robotics and Computer-Integrated Manufacturing, Vol.12, No.3(1996), pp.227-234. https://doi.org/10.1016/0736-5845(96)00010-5
- Jang, Y.J. and G.H. Choi, "Introduction to Automated Material Handling Systems in LCD Panel Production Lines," IEEE International Conference on Automation Science and Engineering, (2006), pp.223-229.
- Agrawal, G.K. and S.S. Heragu, "A survey of automated material handling systems in 300-mm Semiconductor Fabs," IEEE Transactions on Semiconductor Manufacturing, Vol.19, No.1(2006), pp.112-120. https://doi.org/10.1109/TSM.2005.863217
- Montoya-Torres, J.R., "A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs," Production Planning and Control, Vol.17, No.7(2006), pp.648-663. https://doi.org/10.1080/09537280600900774
- Ting, J.H., J.M.A. Tanchoco, "Unidirectional circular layout for overhead material handling systems," International Journal of Production Research, Vol.38, No.16(2000), pp. 3913-3935. https://doi.org/10.1080/00207540050176085
- Ting, J.J. and J.M.A. Tanchoco, "Optimal Bidirectional Spine Layout for Overhead Material Handling Systems," IEEE Transactions on Semiconductor Manufacturing, Vol.14, No.1(2001), pp.57-64. https://doi.org/10.1109/66.909655
- Koo, P.H. and J. Jang, "Vehicle Travel Time Models for AGV Systems under Various Dispatching Rules," International Journal of Flexible Manufacturing Systems, Vol.14, No.3 (2002), pp.249-261. https://doi.org/10.1023/A:1015831711304
- Nazzal, D. and L.F. Mcginnis, "Analytical approach to estimating AMHS performance in 300mm fabs," International Journal of Production Research, Vol.45, No.3(2007), pp. 571-590. https://doi.org/10.1080/00207540600792333
- Mackulak, G.T. and P. Savory, "A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility," IEEE Transactions on Semiconductor Manufacturing, Vol.14, No.3(2001), pp. 273-280. https://doi.org/10.1109/66.939828
- Sun, D.S., N.S. Park, Y.J. Lee, Y.C. Jang, C.S. Ahn, and T.E. Lee, "Integration of lot dispatching and AMHS control in a 300mm wafer FAB," Advanced Semiconductor Manufacturing Conference and Workshop, IEEE/SEMI, 2005.
- Jang, Y.J., G.H. Choi, and S.I. Kim, "Modeling and analysis of stocker system in semiconductor and LCD fab," IEEE International Symposium on Semiconductor Manufacturing, (2005), pp.273-276.
- Li, B., J. Wu, W. Carriker, and R. Giddings, "Factory throughput improvements through intelligent integrated delivery in semiconductor fabrication facilities," IEEE Transactions on Semiconductor Manufacturing, Vol.18, No.1(2005), pp.222-231. https://doi.org/10.1109/TSM.2004.840530
- Sargent, R.G., "Event Graph Modelling for Simulation with an Application to Flexible Manufacturing Systems," Management Science, Vol.34, No.10(1988), pp.1231-1251. https://doi.org/10.1287/mnsc.34.10.1231
- Bondy, J.A. and U.S.R. Murty, "Graph theory with applications," North-holland, NY, 1976.