정보저장시스템학회논문집 (Transactions of the Society of Information Storage Systems)

  • 제8권1호
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  • Pages.16-21
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  • 2012
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  • 1738-6845(pISSN)
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  • 2288-2022(eISSN)
정보저장시스템학회 (The Society of Information Storage Systems)
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집중 소자를 이용한 표면 탄성파 장치 기반의 용량 성 센서 보정 및 이를 이용한 초정밀 간극 측정

Calibration of SAW Based Capacitive Sensor Using Lumped Component and High Precision Gap Measurement

  • 투고 : 2012.03.20
  • 심사 : 2012.03.23
  • 발행 : 2012.03.25
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초록

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

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과제정보

연구 과제 주관 기관 : 한국 연구재단

참고문헌

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