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잉곳의 방향성 응고를 위한 주조 로 개발

Development of Casting Furnace for Directional Solidification Ingot

  • 주진영 (원광대학교 차세대방사선산업기술지역혁신센터) ;
  • 이승준 (원광대학교 반도체.디스플레이학부) ;
  • 백하니 (원광대학교 반도체.디스플레이학부) ;
  • 오훈 (원광대학교 전기.정보통신공학부) ;
  • 조현섭 (청운대학교 이공대학 전자공학과) ;
  • 이충훈 (원광대학교 차세대방사선산업기술지역혁신센터)
  • Ju, Jin-Young (Regional Innovation Center Next Generation Industrial Radiation Technology, Wonkwang University) ;
  • Lee, Seung-Jun (Division of Microelectronics and Display Technology, Wonkwang University) ;
  • Baek, Ha-Ni (Division of Microelectronics and Display Technology, Wonkwang University) ;
  • Oh, Hun (Division of Electrical and Telecommunications Technology, Wonkwang University) ;
  • Cho, Hyun-Seob (Division of Electronic Engineering, Chungwoon University) ;
  • Lee, Choong-Hun (Regional Innovation Center Next Generation Industrial Radiation Technology, Wonkwang University)
  • 투고 : 2012.01.10
  • 심사 : 2012.02.10
  • 발행 : 2012.02.29

초록

본 논문은 열 해석 시뮬레이션과 주조로의 구조 변경을 통한 실리콘 잉곳의 방향성 응고에 대한 연구이다. 열 해석 시뮬레이션에 의한 결과, 용융은 유지 시간이 80분일 때 실리콘이 전체적으로 고르게 용융 온도에 도달하였고 냉각은 상부 냉각 온도가 $1,400^{\circ}C$와 60분 냉각 시 가장 좋은 결과 값을 나타내었다. 제작된 웨이퍼가 기존의 상용웨이퍼보다 결정립계에서의 에칭이 훨씬 적게 이루어졌다. FTIR 측정결과 산소와 탄소 모두 모두 임계값 이하의 불순물로 존재함을 확인하였다. NAA 분석 결과 총 18가지 금속 불순물이 검출 되었지만, 농도 분포는 같은 위치에서 위와 아래의 차이는 크게 나지 않고, 어떤 특정한 위치에서 한쪽으로 집중되거나 어떤 경향성 없이 전체의 샘플의 모든 부분에서 농도가 거의 일정하게 분포를 나타냈다.

This paper is the study for the directional solidification of the ingot through the thermal analysis simulation and structural change of casting furnace. With the results of thermal analysis simulation, the silicon as a whole has reached the melting temperature as the retention time 80 min. The best cooling conditions showed at the upper cooling temperature $1,400^{\circ}C$ and cooling time 60min. The fabricated wafers showed the superior etching result at the grain boundary than that of existing commercial wafers. The FTIR measurements of oxygen and carbon impurities were not in the critical value for solar conversion efficiency. The NAA analysis of metal impurities were also detected the total number of 18 different metals, but the concentration distribution showed no significant positional deviations in the same position from the top to the bottom.

키워드

참고문헌

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