Journal of Electrical Engineering and Technology

  • 제7권2호
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  • Pages.212-220
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  • 2012
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  • 1975-0102(pISSN)
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  • 2093-7423(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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Optimization Shape of Variable-Capacitance Micromotor Using Seeker Optimization Algorithm

  • 투고 : 2010.05.31
  • 심사 : 2011.10.29
  • 발행 : 2012.03.01
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초록

In the current paper, the optimization shape of a polysilicon variable-capacitance micromotor (VCM) was determined using the seeker optimization algorithm (SOA). The optimum goal of the algorithm was to find the maximum torque value and minimum ripple torque by varying the geometrical parameters. The optimization process was performed using a combination of SOA and the finite-element method (FEM). The fitness value was calculated via FEM analysis using COMSOL3.4, and SOA was realized by MATLAB7.4. The proposed method was applied to a VCM with eight and six poles at the stator and rotor, respectively. For comparison, this optimization was also performed using the genetic algorithm. The results show that the optimized micromotor using SOA had a higher torque value and lower torque ripple, indicating the validity of this methodology for VCM design.

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참고문헌

  1. Stephen, F.B., Mehran, M., Lee, S.T., Jeffrey, H.L., and Stephen, D.S, "Electric micromotor dynamics," IEEE Trans. Electron Devices, vol. 39, pp. 566-575, Mar. 1992. https://doi.org/10.1109/16.123479
  2. T. C. Neugebauer, D. J. Perreault, J. H. Lang, C. Livermore, "A Six-Phase Multilevel Inverter for MEMS Electrostatic Induction Micro-motors," IEEE Trans. Circuits and Systems II: Express Briefs, vol. 51, pp. 49-56, Feb. 2004. https://doi.org/10.1109/TCSII.2003.822419
  3. Zhang, W.; Meng, G.; Li, H., "Electrostatic Micromotor and its Reliability," Microelectronics Reliability, vol. 45, pp. 1230-1242, July-August. 2005. https://doi.org/10.1016/j.microrel.2004.12.017
  4. V.Bahjat and A.Vahedi, "Minimizing the torque ripple of variable capacitance electrostatic micromotors," Journal of Electrostatics, vol. 64, pp. 361-367, June. 2006. https://doi.org/10.1016/j.elstat.2005.09.003
  5. Johansson, T.B.; Van Dessel, M.; Belmans, R.; Geysen. W, "Technique for finding the optimum geometry of electrostatic micromotors," IEEE Trans. Industry Applications, vol. 30, pp. 912-919, Jul/Aug 1994. https://doi.org/10.1109/28.297907
  6. Chaohua Dai, Weirong Chen and Yunfang Zhu, "Seeker Optimization Algorithm". IEEE Int. Conf. on Computational Intelligence and Security, 2006, Vol. 1, pp. 229-248.
  7. Chaohua Dai, Weirong Chen, Yunfang Zhu and Xuexia Zhang, "Seeker Optimization Algorithm for Optimal Reactive Power Dispatch". IEEE Transactions on Power Systems, vol. 24, pp. 1218 - 1231, 2009. https://doi.org/10.1109/TPWRS.2009.2021226
  8. W.K.S. Pao, W.S.H. Wong and A. M. K. Lai, "An explicit drive algorithm for aiding the design of firing sequence in side-drive micromotor," Communications in Numerical Methods in Engineering, vol. 24, pp. 2131-2136, Dec. 2008. https://doi.org/10.1002/cnm.1100
  9. Sujay S. Irudayaraj and Ali Emadi, "Micromachines: Principles of Operation, Dynamics, and Control," in IEEE Int. Conf. Electric Machines and Drives, 2005, pp. 1108-1115.
  10. Delfino, F.; Rossi, M, "A new FEM approach for field and torque simulation of electrostatic microactuators," IEEE J. Microelectromechanical Systems, vol. 11, pp. 362-371, Aug. 2002. https://doi.org/10.1109/JMEMS.2002.800931
  11. Long Sheng Fan, Yu-Chung Tai, Richard S. Muller, "ICProcessed Electrostatic Micro-motors," in IEEE Int. Conf. Electron Devices Meeting, 1988, pp. 666-669.
  12. A. Jindal, M.Krishnamurthy, B. Fahimi, "Micromachines: Principles of Operation, Dynamics, and Control," in IEEE Int. Conf. Power Electronics, Electrical Drives, Automation, 2005, pp. 358-365.
  13. S.Wiak, P. Di Barba and A. Savini, "3-D Computer Aided Analysis of the "Berely" Electrostatic Micromotor," IEEE Trans. Magnetics, vol. 31, pp. 2108-2111, May. 1995. https://doi.org/10.1109/20.376461
  14. Behjat. V,.Vahedi. A, "Analysis and Optimization of MEMS Electrostatic Microactuator," in IEEE Int. Conf. Perspective Technologies and Methods in MEMS Design, 2007, pp. 20-25.
  15. Larry Schumaker, Spline Functions: Basic Theory, Cambridge University Press, 2007, ch.1.
  16. Milne, N.G.; Yang, S.J.E.; Sangster, A.J.; Ziad, H.; Spirkovitch, S, "Determination of the forces present in an electrostatic micromotor," in IEEE Int. Conf. Electrical Machines and Drives, 1993, pp. 9-14.
  17. J. U. Duncombe, "Infrared navigation-Part I: An assessment of feasibility (Periodical style)," IEEE Trans. Electron Devices, vol. ED-11, pp. 34-39, Jan. 1959.
  18. Stumberger, G. Dolinar, D. Palmer, U. Hameyer, K, "Optimization of radial active magnetic bearings using the finite element technique and the differential evolution algorithm," IEEE Trans. Magnetics, vol.36, pp. 1009-1013, Jul. 2000. https://doi.org/10.1109/20.877612
  19. Michalewicz. Z, "Seeker Optimization Algorithm for Digital IIR Filter Design", IEEE Transactions on Industrial Electronics, vol. 57, pp. 1710 - 1718, 2010. https://doi.org/10.1109/TIE.2009.2031194