반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

원추형 기판 위에 탄소 나노튜브의 선택적 성장이 전계방출 특성에 미치는 영향

Effects of Selective Growth on Electron-emission Properties of Conical-type Carbon Nanotube Field-emitters

  • 김부종 (한양대학교 전자시스템공학과) ;
  • 노영록 (한양대학교 전자시스템공학과) ;
  • 박진석 (한양대학교 전자시스템공학과)
  • Kim, Bu-Jong (Dept. of Electronic Systems Engineering, Hanyang University) ;
  • Noh, Young-Rok (Dept. of Electronic Systems Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic Systems Engineering, Hanyang University)
  • 투고 : 2012.02.22
  • 심사 : 2012.03.15
  • 발행 : 2012.03.31
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초록

In this study, for use of carbon nanotubes (CNTs) as a cold cathode of x-ray tubes, we examine the effects of selective growth of CNTs on their field emission properties and long-term stability. The selective growth of CNTs was performed by selectively etching the catalyst layer which was used for CNTs' nucleation. CNTs were grown on conical-type tungsten substrates using an inductively-coupled plasma chemical vapor deposition system. For all the grown CNTs, their morphologies and microstructures were analyzed by field-emission scanning electron microscope and Raman spectroscopy. The electron-emission properties of CNTs and the long-term stability of emission currents were measured and characterized according to the CNTs' growth position on the substrate.

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참고문헌

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