참고문헌
- L. Gong, Z.Z. Ye, J.G. Lu, L.P. Zhu, J.Y. Huang, X.Q. Gu, and B.H. Zhao, "Highly transparent conductive and near-infrared reflective ZnO:Al thin films", Vacuum Vol. 84, pp. 947-952, 2010 https://doi.org/10.1016/j.vacuum.2010.01.010
- K. Jung, W. K. Choi, S.J. Yoon, H.J. Kim, and J.W. Choi, "Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread", Appl. Surf. Sci. Vol.256 pp. 6219-6223, 2010 https://doi.org/10.1016/j.apsusc.2010.03.144
- D.C. Look, K.D. Leedy, D.H. Tomich, and B. Bayraktaroglu, "Mobility analysis of highly conducting thin films: application to ZnO", Appl. Phys. Lett. Vol. 96 pp. 062102, 2010. https://doi.org/10.1063/1.3310043
- M. Brandt, H. von Wenckstern, G. Benndorf, M. Lange, C.P. Dietrich, C. Kranert, C. Sturm, R. Schmidt-Grund, H. Hochmuth, M. Lorenz, M. Grundmann, M.R. Wagner, M. Alic, C. Nenstiel, and A. Hoffmann, "Identification of a donor-related recombination channel in ZnO thin films", Phys. Rev. B: Condens. Matter, Vol. 81, pp 073306, 2010. https://doi.org/10.1103/PhysRevB.81.073306
- H. Bo, M.Z. Quan, X. Jing, Z. Lei, Z.N. Sheng, L. Feng, S. Cheng, S. Ling, M.X. Jie, Z.C. Yue, Y.Z. Shan, and Y.Y. Ting, " Realization and characterization of an ITO/AZO/SiO2/p-Si SIS heterojunction", Superlattices Microstruct., Vol. 46,pp. 664-671, 2009. https://doi.org/10.1016/j.spmi.2009.04.013
- I.A. Buyanova, X.J. Wang, W.M. Wang, C.W. Tu, and W.M. Chen, "Effects of Ga doping on optical and structural properties of ZnO epilayers", Superlattices Microstruct.,Vol.45, pp. 413-420, 2009 https://doi.org/10.1016/j.spmi.2008.10.039
- H.Y. Lee, Y.H. Chou, C.T. Lee, W.Y. Yeh, and M.T. Chu, "Mechanisms of lighting enhancement of Al nanoclusters-embedded Al doped ZnO film in GaNbased light-emitting diodes", J. Appl. Phys., Vol. 107,pp. 014503, 2010. https://doi.org/10.1063/1.3276092
- Y.H. Kim, K.S. Lee, T.S. Lee, B. Cheong, T.Y. Seong, and W.M. Kim, "Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering", Appl. Surf. Sci., Vol. 255 pp. 7251-7256, 2009. https://doi.org/10.1016/j.apsusc.2009.03.075
- Y.S Jung, H. W. Choi, S. J. Park,H.H. Yoon, and K.H.Kim, "Properties of AZO Thin Films for Solar Cells Deposited on Polycarbonate Substrates, J. Korean. Phy. Soc. 55 pp.1945-1949, 2009 https://doi.org/10.3938/jkps.55.1945
- L. Li a, L. Fang b, X.M. Chen , J. Liu , F.F. Yang , Q.J. Li , G.B. Liu , and S.J. Feng,"Influence of oxygen argon ratio on the structural, electrical, optical and thermoelectrical properties of Al-doped ZnO thin films" Physica E, Vol. 41, pp.169-174, 2008 https://doi.org/10.1016/j.physe.2008.07.001
- K.H. Kim, K.C. Park, and D.Y. Ma, "Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering", J. Appl. Phys.Vol. 81, pp. 7764-7771, 1997 https://doi.org/10.1063/1.365556
- J.A. Thornton, "Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings ", J. Vac. Sci. Technol.,Vol. 12, pp. 666-670, 1974
- J.L. Chung, J.C. Chen, and C.J. Tseng, "Preparation of TiO2-doped ZnO films by radio frequency magnetron sputtering in ambient hydrogen-argon gas" Appl. Surf. Sci. 255, pp. 2494-2499, 2008 https://doi.org/10.1016/j.apsusc.2008.07.125