한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제45권6호
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  • Pages.232-241
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  • 2012
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique

  • Myoung, Hee-Bok (School of Materials Science and Engineering, Pusan National University) ;
  • Zhang, Teng Fei (School of Materials Science and Engineering, Pusan National University) ;
  • Park, Jong-Keuk (Electronic Materials Center, Korea Institute of Science and Technology) ;
  • Kim, Doo-In (National Core Research Center for Hybrid Materials Solution, Pusan National University) ;
  • Kim, Kwang Ho (School of Materials Science and Engineering, Pusan National University)
  • 투고 : 2012.11.06
  • 심사 : 2012.12.30
  • 발행 : 2012.12.31
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초록

Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a $TiB_2$ and a Cr target in argon-nitrogen environment, respectively. By changing the power applied on the Cr and $TiB_2$ cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the $CrTi_{0.1}B_{0.4}N_{1.3}$, and then decreased with further increase of Cr content in the coatings, and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of the Cr-Ti-B-N coatings revealed better properties due to the formation of a nanocomposite microstructure.

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피인용 문헌

  1. An investigation on the crack resistance of CrN, CrBN and CrTiBN coatings via nanoindentation vol.145, 2017, https://doi.org/10.1016/j.vacuum.2017.08.041