Journal of the Optical Society of Korea

  • 제16권4호
  • /
  • Pages.396-400
  • /
  • 2012
  • /
  • 1226-4776(pISSN)
  • /
  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
권호 표지
DOI QR코드

DOI QR Code

Theoretical Considerations on Combined Optical Distance Measurements Using a Femtosecond Pulse Laser

  • Joo, Ki-Nam (Department of Photonics Engineering, Chosun University) ;
  • Kim, Seung-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 투고 : 2012.07.25
  • 심사 : 2012.09.26
  • 발행 : 2012.12.25
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

We introduce a combined technique and the mathematical description for distance measurements using a femtosecond pulse laser in a long range and a fine resolution. For distance measurements, the maximum measurable range can be extended by combining measurement results from several different methods while requiring relationships between the different measurement uncertainties and unambiguity ranges. This paper briefly explains why the uncertainty of a rough measurement technique (RMT) should be, at least, smaller than the half unambiguity range of a fine measurement technique (FMT) in order to combine a FMT with a RMT. Further discussions about the total measurement range, resolution, and uncertainty for various optical measurement techniques are also discussed.

키워드

참고문헌

  1. H. Matsumoto, "Synthetic interferometric distance-measuring system using a $CO_{2}$ laser," Appl. Opt. 25, 493-498 (1986). https://doi.org/10.1364/AO.25.000493
  2. A. G. Stove, "Linear FMCW radar techniques," IEE Proc. Radar and Signal Processing 139, 343-350 (1992).
  3. R. Dandliker, K. Hug, J. Politch, and E. Zimmermann, "High-accuracy distance measurements with multiple-wavelength interferometry," Opt. Eng. 34, 2407-2412 (1995). https://doi.org/10.1117/12.205665
  4. G. P. Barwood, P. Gill, and R. C. Rowley, "High-accuracy length metrology using multiple-stage swept-frequency interferometry with laser diodes," Meas. Sci. Technol. 9, 1036- 1041 (1998). https://doi.org/10.1088/0957-0233/9/7/005
  5. K. Minoshima and H. Matsumoto, "High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser," Appl. Opt. 39, 5512-5517 (2000). https://doi.org/10.1364/AO.39.005512
  6. J. Ye, "Absolute measurement of a long, arbitrary distance to less than an optical fringe," Opt. Lett. 29, 1153-1155 (2004). https://doi.org/10.1364/OL.29.001153
  7. K.-N. Joo and S.-W. Kim, "Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser," Opt. Express 14, 5954-5960 (2006). https://doi.org/10.1364/OE.14.005954
  8. Y. Salvadé, N. Schuhler, S. Lévêque, and S. L. Floch, "High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source," Appl. Opt. 47, 2715-2720 (2008). https://doi.org/10.1364/AO.47.002715
  9. K.-N. Joo, Y. Kim, and S.-W. Kim, "Distance measurements by combined method based on a femtosecond pulse laser," Opt. Express 16, 19799-19806 (2008). https://doi.org/10.1364/OE.16.019799
  10. I. Coddington, W. C. Swann, L. Nenadovic, and N. R. Newbury, "Rapid and precise absolute distance measurements at long range," Nature Photon. 3, 351-356 (2009). https://doi.org/10.1038/nphoton.2009.94
  11. J. Lee, Y.-J. Kim, K. Lee, S. Lee, and S.-W. Kim, "Timeof- flight measurement with femtosecond light pulses," Nature Photon. 4, 716-720 (2010). https://doi.org/10.1038/nphoton.2010.175
  12. O. P. Lay, S. Dubovitsky, R. D. Peters, J. P. Burger, S.-W. Ahn, W. H. Steier, H. R. Fetterman, and Y. Chang, "MSTAR: a submicrometer absolute metrology system," Opt. Lett. 28, 890-892 (2003). https://doi.org/10.1364/OL.28.000890
  13. P. de Groot, "Three-color laser-diode interferometer," Appl. Opt. 30, 3612-3616 (1991). https://doi.org/10.1364/AO.30.003612

피인용 문헌

  1. Methods to Measure the Critical Dimension of the Bottoms of Through-Silicon Vias Using White-Light Scanning Interferometry vol.18, pp.5, 2014, https://doi.org/10.3807/JOSK.2014.18.5.531
  2. Approach of Self-mixing Interferometry Based on Particle Swarm Optimization for Absolute Distance Estimation vol.19, pp.1, 2015, https://doi.org/10.3807/JOSK.2015.19.1.095
  3. 3D Measurement of TSVs Using Low Numerical Aperture White-Light Scanning Interferometry vol.17, pp.4, 2013, https://doi.org/10.3807/JOSK.2013.17.4.317