Journal of information and communication convergence engineering

  • 제9권4호
  • /
  • Pages.461-465
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  • 2011
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  • 2234-8255(pISSN)
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  • 2234-8883(eISSN)
한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
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Influence of Surface Texturing on the Electrical and Optical Properties of Aluminum Doped Zinc Oxide Thin Films

  • Lee, Jaeh-Yeong (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Shim, Joong-Pyo (Kunsan National University) ;
  • Jung, Hak-Kee (School of Microelectronic Engineering, Griffith University)
  • 투고 : 2011.07.24
  • 심사 : 2011.08.10
  • 발행 : 2011.08.31
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초록

An aluminum doped zinc oxide (AZO) film for front contacts of thin film solar cells, in this work, were deposited by r.f. magnetron sputtering, and then etched in diluted hydrochloric acid solution for different times. Effects of surface texturing on the electro-optical properties of AZO films were investigated. Also, to clarify the light trapping of textured AZO film, amorphous silicon thin film solar cells were fabricated on the textured AZO/glass substrate and the performance of solar cells were studied. After texturing, the spectral haze at the visible range of 400 ~750 nm increased substantially with the etching time, without a change in the resistivity. The conversion efficiency of amorphous Si solar cells with textured AZO film as a front electrode was improved by the increase of short-circuit current density ($J_{sc}$), compared to cell with flat AZO films.

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참고문헌

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피인용 문헌

  1. Electrical and Optical Properties of ITZO Thin Films Deposited by RF Magnetron Sputtering vol.17, pp.8, 2013, https://doi.org/10.6109/jkiice.2013.17.8.1873
  2. 공정압력이 SiO2 버퍼층을 갖는 PES 기판위에 증착한 ITZO 박막의 전기적 및 광학적 특성에 미치는 영향 vol.14, pp.5, 2011, https://doi.org/10.13067/jkiecs.2019.14.5.887