Journal of Electrical Engineering and Technology

  • 제6권6호
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  • Pages.836-841
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  • 2011
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  • 1975-0102(pISSN)
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  • 2093-7423(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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Preparation and Characterization of Plasma Polymerized Methyl Methacrylate Thin Films as Gate Dielectric for Organic Thin Film Transistor

  • Ao, Wei (Dept. of Electrical Engineering, INHA University) ;
  • Lim, Jae-Sung (Dept. of Electrical Engineering, INHA University) ;
  • Shin, Paik-Kyun (Dept. of Electrical Engineering, INHA University)
  • 투고 : 2010.11.29
  • 심사 : 2011.06.01
  • 발행 : 2011.11.01
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초록

Plasma polymerized methyl methacrylate (ppMMA) thin films were deposited by plasma polymerization technique with different plasma powers and subsequently thermally treated at temperatures of 60 to $150^{\circ}C$. To find a better ppMMA preparation technique for application to organic thin film transistor (OTFT) as dielectric layer, the chemical composition, surface morphology, and electrical properties of ppMMA were investigated. The effect of ppMMA thin-film preparation conditions on the resulting thin film properties were discussed, specifically O-H site content in the pMMA, dielectric constant, leakage current density, and hysteresis.

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참고문헌

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피인용 문헌

  1. Electrical conduction mechanism in plasma polymerized 2-(diethylamino)ethyl methacrylate thin films vol.55, pp.12, 2015, https://doi.org/10.1002/pen.24161
  2. Effect of heat treatment on the structural and optical characteristics of plasma deposited 2-(diethylamino)ethyl methacrylate thin films by a capacitively coupled glow discharge plasma system vol.88, pp.4, 2013, https://doi.org/10.1088/0031-8949/88/04/045502
  3. THERMAL AND AC ELECTRICAL PROPERTIES OF THIN FILMS PREPARED FROM n-BUTYL METHACRYLATE BY A CAPACITIVELY COUPLED PLASMA REACTOR pp.1793-6667, 2018, https://doi.org/10.1142/S0218625X18501469
  4. Effect of heat treatment on infrared and ultraviolet–visible spectroscopic studies of the PPnBMA thin films vol.124, pp.12, 2018, https://doi.org/10.1007/s00339-018-2270-5
  5. Morphological, elemental, and optical characterization of plasma polymerized n-butyl methacrylate thin films vol.124, pp.5, 2018, https://doi.org/10.1007/s00339-018-1795-y
  6. Evaluation of Electrical Carrier Transport Mechanism in Plasma Polymerized n-Butyl Methacrylate Thin Films vol.60, pp.6, 2018, https://doi.org/10.1134/S0965545X18070040