References
- F. Vaz, J. Ferreira, E. Riberio, L. Rebouta, S. Lanceros- Mendez, J. A. Mendes, E. Alves, Ph. Goudeau et al., Surf. Coat. Tech., 191 (2005) 317. https://doi.org/10.1016/j.surfcoat.2004.01.033
- A. Kagiyama, K. Terakadoa, R. Uraob, Surf. Coat. Tech., 397 (2003) 169.
- J. W. Uhm, H. T. Joen, Jpn. J. Appl. Phys., 40 (2001) 4657. https://doi.org/10.1143/JJAP.40.4657
- W. D. Sproul, J. E. Greene, J. A. Thornton (Eds), Phys. Chem. Protective Coat., American Inst. Phys., (1986) 50.
- N. Y. Kim, Y. B. Son, J. H. Oh, C. K. Hwangbo, M. C. Park, Surf. Coat. Tech., 156(160) (2000) 128.
- Y. S. Kim, H. Jone, Y. D. Kim, J. Kor. Phys. Soc., 37 (2000) 1045. https://doi.org/10.3938/jkps.37.1045
- C. Rebholz, A. Leyland, P. Larour, C. Charitidis, S. Logothetidis, A. Matthews, Surf. Coat. Tech., 116(119) (1999) 648. https://doi.org/10.1016/S0257-8972(99)00260-1
- J. Sellers, Surf. Coat. Tech., 98 (1998) 1245. https://doi.org/10.1016/S0257-8972(97)00403-9
- H. D. Ko, C. S. Lee, W. P. Tai, S. J. She, Y. S. Kim, J. Kor. Ceram. Soc., 41(6) (2004) 476. https://doi.org/10.4191/KCERS.2004.41.6.476
- J. H. Kim, J. K. Lee, J. H. Ahn, J. Kor. Ceram. Soc., 38(1) (2001) 61.
- W. D. Sproul, J. Vac. Sci. Tech., 51 (1998) 641.
- J. Sellers, Surf. Coat. Tech., 98 (1998) 1245. https://doi.org/10.1016/S0257-8972(97)00403-9
- J. W. Lee, S. K. Tien, Y. C. Kuo, J. Elec. Mater., 34 (2005) 1484. https://doi.org/10.1007/s11664-005-0155-9
- B. D. Cullity, S. R. Stock, Element of X-ray Diffraction, Prentice-Hall Inc., 3rd (2001) 167.
- I. Petrov, P. B. Barna, L. Hultman, J. E. Greene, J. Vac. Sci. Tech. A, 21 (2003) 774.
- N. Maazi, N. Rouag, J. Cryst. Growth, 243 (2002) 361. https://doi.org/10.1016/S0022-0248(02)01420-3
- I. Petrov, L. Hultman, U. Helmersson, S. A. Barnett, J. E. Sundgern, J. E. Green, Thin Solid Films, 169 (1989) 299. https://doi.org/10.1016/0040-6090(89)90713-X
- S. Kim, D. M. Kim, S. Kang, H. J. Kim, J. Kor. Ceram. Soc., 46(2) (2009) 116. https://doi.org/10.4191/KCERS.2009.46.1.116
Cited by
- A Comparative Study of CrN Coatings Deposited by DC and Asymmetric Bipolar Pulsed DC Sputtering vol.47, pp.2, 2014, https://doi.org/10.5695/JKISE.2014.47.2.086
- Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of VN Coatings vol.49, pp.4, 2016, https://doi.org/10.5695/JKISE.2016.49.4.376