References
- Flamm D. L, "Plasma Processing of Semiconductors" Williams P F, NATO ASI series, pp.1-22. 1997.
- 奧田孝美, "氣體プラズマ現象", コロナ社, pp. 21-33, 1975.
- 山本賢三, 奧田孝美, "電離氣體", コロナ사, pp. 161-197, 1977.
- 武田進著, "プラズマの基礎", 朝倉 書店, pp. 17-58, 1976.
- 森正武, "Fortran 77 數値計算 プログ ラミング" (岩波書店), pp. 41-44, 1995.
- モンテカルロ法 と シミユレ-シヨン(培風館), 1989.
- 市川行和, 高柳和夫, 島材勳, "衝突の理論(上 下)", 吉岡書店, pp. 192, 1975.
- 高柳和夫, "電子, 原子, 分子の衝突", 培風館, pp. 51-69, 1978.
-
H. Itoh, T. Matsumura, K. Satoh, Y. Nakao and H. Tagashira, "Development of electrons swarms in
$CF_4$ ", Proc. 21st int. Conf. on Phenomena in Ionized Gases, (ICPIG) (Bochum : Germany) 1, pp. 245-6, 1993. - R. W. L. Thomas, and W. R. L. Thomas, "Monte Carlo simulation of electrical discharge in gases", J.Phys. B. Vol. 2, pp.562-570, 1969. https://doi.org/10.1088/0022-3700/2/5/309
- S. A. J. Al-Amin and J. Lucas, "Electron swarm parameters in oxygen and methane", J. Phys. D:Appl. 18. pp. 1781-1794, 1985. https://doi.org/10.1088/0022-3727/18/9/009
- Huxley L G H and Crompton R W "Diffusion and Drift of Electrons in gases", Wiley, 1974
- Y Ohmori, K Kitamori, H Tagashira " Boltzmann equation analysis of electron swarm behavior In Methane" The Institute of Physics. 437-455 1986
- Philip E. Luft. "Description of a backward prolongation program for computing transport coefficients" JILA Information center report, Vol. No. 14. 1975.
- Y. Nakamura, M. Kurachi "Electron Transport Parameters in Argon and its momentum transfer cross section" J.Phys.21, pp.718-723, 1988
- Y. Ohmori, K. Kitamori, M Shimozuma, and H. Tagashira, "Boltzmann equation analysis of electron swarm behaviour in methane", J. Phys. D. 19, pp.437-55, 1986. https://doi.org/10.1088/0022-3727/19/3/013
- L. G. H. Huxley, R. W. Cormpton. "The Diffusion and Drift of Electrons in Gases" John Wiley and Sons. Inc 1974
- L. E. Kline and W. E. Bies, "Measurements of swarm parameters and derived electron collision cross sections in methane", J. Appl. Phys. 65. pp. 3311-3323. 1989. https://doi.org/10.1063/1.342642
- K. L. Bell, N. S. Scott and M. A. Lennon, "The Scattering of low-energy electrons by Argon atoms" J. Phys. B: At. Mol. Phys. 17, pp. 4757-4765, 1984 https://doi.org/10.1088/0022-3700/17/23/016
- K. L. Bell, N. S. Scott and M. A. Lennon, "The Scattering of low-energy electrons by Argon atoms" J. Phys. B: At. Mol. Phys. 17, pp. 4757-4765, 1984 https://doi.org/10.1088/0022-3700/17/23/016
- Arati Dasqupta and A. K. Bhatia, "Scattering of electrons from Argon atoms" Phys. Rev. A. Vol.32, No. 6, pp.3335-3341, 1985 https://doi.org/10.1103/PhysRevA.32.3335
- W. C. Fon, K. A. Berrington, P. G. Burke, "The elastic Scattering of electrons from inert gases:
- J. H. Parker and I. J. Lowke "Theory of Electron Diffusion Parallel to Electric Fields, II.Application to real Gases" Phys. Rev, Vol.181, No. 1, pp. 302-311, 1969 https://doi.org/10.1103/PhysRev.181.302
-
山本, 生田, "
$CF_4$ カスの電子衝突斷面績と輸送係數",電 氣學會放電硏究會資料, ED-91-70, pp.11-20, 1991. -
小田信一, 駒田正人, 中村義春, "
$CF_4-Ar$ および$CF_4-Ar$ 混合氣体中の電子輸送係數の測定", 電氣學會放電硏究會 資料, 中村義春, ED-92-145, 1992