반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

반도체 칩의 높이 측정을 위한 스테레오 비전의 측정값 조정 알고리즘

Adjustment Algorithms for the Measured Data of Stereo Vision Methods for Measuring the Height of Semiconductor Chips

  • 김영두 (한국기술교육대학교 컴퓨터공학부) ;
  • 조태훈 (한국기술교육대학교 컴퓨터공학부)
  • Kim, Young-Doo (School of Computer Engineering, Korea University of Technology and Education) ;
  • Cho, Tai-Hoon (School of Computer Engineering, Korea University of Technology and Education)
  • 투고 : 2011.05.09
  • 심사 : 2011.06.15
  • 발행 : 2011.06.30
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초록

Lots of 2D vision algorithms have been applied for inspection. However, these 2D vision algorithms have limitation in inspection applications which require 3D information data such as the height of semiconductor chips. Stereo vision is a well known method to measure the distance from the camera to the object to be measured. But it is difficult to apply for inspection directly because of its measurement error. In this paper, we propose two adjustment methods to reduce the error of the measured height data for stereo vision. The weight value based model is used to minimize the mean squared error. The average value based model is used with simple concept to reduce the measured error. The effect of these algorithms has been proved through the experiments which measure the height of semiconductor chips.

키워드

참고문헌

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