결정질 태양전지의 후면 패시베이션을 위한 ALD $Al_2O_3$ 막 연구

A Study on ALD $Al_2O_3$ Films for Rear Surface Passivation of Crystalline Silicon Solar Cells

  • 노시철 (한국기술교육대학교 전기전자통신공학과) ;
  • 서화일 (한국기술교육대학교 전기전자통신공학과)
  • Roh, Si-Cheol (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Seo, Hwa-Il (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education)
  • 투고 : 2011.02.15
  • 심사 : 2011.03.15
  • 발행 : 2011.03.31

초록

To develop high efficiency crystalline solar cells, the rear surface passivation is very important. In this paper, $Al_2O_3$ films deposited by thermal ALD(atomic layer deposition) method were studied for rear surface passivation of crystalline solar cells and their passivation properties were evaluated. After the deposition of $Al_2O_3$ films on p-type Si wafers, the lifetime was increased very much due to the reduction of interface state density and the field effects of the negative fixed charge in the films. Also, optimum annealing condition and effects of SiNx capping layer were investigated. The best lifetime was obtained when the films were annealed at $400^{\circ}C$ for 15min. And the lifetime degradation of the $Al_2O_3$ films with SiNx capping layers was improved compared to those without the capping layers.

키워드

참고문헌

  1. Korea Institute of Energy Research, "PV research association workshop 2011", KIER, pp. 1-122, 2011.
  2. Korea Photovoltaic Industry Association, "PV World Forum 2011: 1st Day - Conference Data Book", Infothe, pp. 9-188, 2011.
  3. Erwin Kessels, "Excellent passivation of crystalline Si solar cells by atomic layer deposited $Al_2O_3$", Dept. of Applied Physics, Technische Universiteit Eindhoven University of technology, pp. 3-39.
  4. Paul Poodt, "Ultrafast ALD of alumina layers for solar cell passivation", TNO Science & Industry, pp. 7-8, 2010.
  5. H. angermann, W. Henrion, M. Rebien, and A. Roseler, "Wet-chemical passivation and characterization of silicon interfaces for solar cell applications", Solar Energy Materials & Solar Cells, 83, pp. 331-346, 2004. https://doi.org/10.1016/j.solmat.2004.01.031
  6. R. Jayakrishnan and Prakash Suratkar, "Dielectric coating: agents for passivation and anti-reflection", J. of Photovoltaics International, Edition 6, pp. 83-86, 2009.
  7. Wen-Ching Sun, Chien-Hsun Chen, Chien-Rong Huang, Chen-Hsun Du, T.Y. Wang, and Chung-Wen Lan, "Excellent passivation structure of high efficiency multicrystalline silicon solar cells", 33rd IEEE PVSC, 978-1-4244-1641-7, 2008.
  8. Daniel Kania, Pierre Saint-Cast, Dirk Wagenmann, Marc Hofmann, Jochen Rentsch, and Ralf Preu, "Industrial Negatively Charged c-Si Surface Passivation by Inline PECVD AlOx", 24th EUPVSEC, pp. 2275-2278, 2009.
  9. W.L. Chang, W.C. Sun, C.H. Lin, and C.W. Lan, "High Performance Monocrystalline Silicon Solar Cells by Using Rear Surface Passivation of $Al_2O_3$/SiNx Stacks Structure", 23rd EUPVSEC, pp. 1349-1351, 2008.