Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on HF Chemical Passivation for Crystalline Silicon Solar Cell Application

결정질 태양전지를 위한 HF 화학 패시베이션 연구

  • Choi, Jeong-Ho (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Roh, Si-Cheol (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Yu, Dong-Yeol (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Li, Zhen-Hua (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Kim, Yeong-Cheol (School of Energy & Materials & chemical Engineering, Korea University of Technology and Education) ;
  • Seo, Hwa-Il (Dept. of Electrical & Electronic & Communication Engineering, Korea University of Technology and Education)
  • 최정호 (한국기술교육대학교 전기.전자.통신공학과) ;
  • 노시철 (한국기술교육대학교 전기.전자.통신공학과) ;
  • 유동열 (한국기술교육대학교 전기.전자.통신공학과) ;
  • 이진화 (한국기술교육대학교 전기.전자.통신공학과) ;
  • 김영철 (한국기술교육대학교 에너지.신소재.화학공학부) ;
  • 서화일 (한국기술교육대학교 전기.전자.통신공학과)
  • Received : 2011.02.15
  • Accepted : 2011.03.15
  • Published : 2011.03.31
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Abstract

The surface passivation is one of the important methods that can improve the efficiency of solar cells and can be classified into two methods: wet-chemical passivation and film passivation. In this paper, chemical HF treatment were employed for the passivation of n-type silicon wafers and their effects were studied. To investigate film passivation effects, the silicon nitride films were also deposited by PECVD (plasma-enhanced chemical vapor deposition) on n-type silicon wafers treated with chemical HF. The minority carrier lifetime measurements were used for evaluation of the passivation characteristics in the all experiments steps. We confirmed that the minority carrier lifetime was improved with chemical HF treatment due to passivation effects by H-termination.

Keywords

References

  1. Korea Institute of Energy Research, "2011 workshop of association for research on PV", KIER, pp. 1-122, 2011.
  2. Korea Photovoltaic Industry Association, "PV World Forum 2011: 1st Day - Conference Data Book", Infothe, pp. 9-188, 2011.
  3. Kim, Y. H., Lee, J. S., "Introduction to Solar Cell Production", Dooyangsa, pp. 9-313, 2009.
  4. PVCDROM, http://www.pvcdrom.pveducation.org/.
  5. Florence W. Chen, Tsu-Tsung A. Li, and Jeffrey E. Cotter, "PECVD silicon nitride surface passivation for high-efficiency n-type silicon solar cells", IEEE 4th WCPEC, Vol. 1, pp. 1020-1023, 2006.
  6. Jianhua Zhao and Aihua Wang, "High efficiency rear emitter PERT cells on CZ and FZ n-type silicon substrates", IEEE 4th WCPEC, Vol. 1, pp. 996-999, 2006.
  7. H. Angermann, W. Henrion, M. Rebien, A. Röseler, "Wet-chemical passivation and characterization of silicon interfaces for solar cell applications", Solar Energy Materials & Solar Cells, Vol. 83, PP. 331-346, 2004. https://doi.org/10.1016/j.solmat.2004.01.031
  8. H. Angermann, "passivation of structured p-type silicon interface: Effect of surface morphology and wet-$\gg:\ll$- pre-treatment", Applied Surface Science, Vol. 254, pp. 8067-8074, 2008. https://doi.org/10.1016/j.apsusc.2008.03.022
  9. Young Do Kim, Sungeun Park, Jooyong Song, Sung Ju Tark, Min Gu Kang, Soonwoo Kwon, Sewang Yoon, Donghwan Kim, "Surface passivation of crystalline wafer via hydrogen plasma pre-treatment for solar cells", Solar Energy Materials & Solar Cells, Vol. 95, pp. 73-76, 2011. https://doi.org/10.1016/j.solmat.2010.04.049
  10. Hiroshi Yamamoto, Michio Ohsubo, Tsutomu Sugiura, Amornrat Limmanee, Takehiko Sato, Shinsuk Miyajima, Akira Yamada and Makoto Konagil, "Low temperature deposition of a-SiO:H films for high quality rear surface passivation", 22nd EUPVSEC, pp. 1224-1226, 2007.
  11. A.Laades, J.Brauer, U.Stürzebeeher, K.Neckermann, K.Klimm, M.Blech, K.Lauer, A.Lawerenz, H.Angermann, "Wet-chemical treatment of solar grade cz silicon prior to surface passivation", 24nd EUPVSEC, pp. 1640-1644, 2009.
  12. Korea Institute of Energy Research, "Effect of cleaning processes of silicon wafer on surface passivation and a-Si:H/c-Si hetero-junction solar cell performances". Korean Journal of Materials Research, Vol. 20, pp. 210-216, 2010. https://doi.org/10.3740/MRSK.2010.20.4.210