참고문헌
- Pei, Z. J., Fisher, G. R., and Liu, J., "Grinding of Silicon Wafers: A View from Historical Perspectives," International Journal of Machine Tools and Manufacture, Vol. 48, pp. 1297-1307, 2008. https://doi.org/10.1016/j.ijmachtools.2008.05.009
- Sun, W., Pei, Z. J., and Fisher, G. R., "Fine Grinding of Silicon Wafers: Effects of Chuck Shape on Grinding Marks," International Journal of Machine Tools and Manufacture, Vol. 45, pp. 673-686, 2005. https://doi.org/10.1016/j.ijmachtools.2004.09.020
- Larson, R. G. and Rehg, T. J., "Spin Coating," Liquid Film Coating, edited by Kistler, S. F. and Schweizer, P. M., Chapman & Hill, London, pp. 709-734, 1997.
- Bornside, D. E., Brown, R. A., Ackmann, P. W., Frank, J. R., Tryba, A. A., and Geyling, F. T., "The Effects of Gas Phase Convection on Mass Transfer in Spin Coating," Journal of Applied Physics, Vol. 73, pp. 585-600, 1993. https://doi.org/10.1063/1.353368
- Oztekin, A., Bornside, D. E., Brown, R. A., and Seidel, P. K., "The Connection between Hydrodynamic Stability of Gas Flow in Spin Coating and Coated Film Uniformity," Journal of Applied Physics, Vol. 77, pp. 2297-2308, 1995. https://doi.org/10.1063/1.358751
- Yang, Y.-K. and Chang, T.-C., "Experimental Analysis and Optimization of a Photo Resist Coating Process for Photolithography in Wafer Fabrication," Microelectronics Journal, Vol. 37, pp. 746-751, 2006. https://doi.org/10.1016/j.mejo.2005.10.006
- Kim, K., Kwak, H. S., and Park, K. S., "An Experimental Study on Wafer Demounting by Water Jet in a Waxless Silicon Wafer Mounting System," Journal of the Semiconductor & Display Equipment Technology, Vol. 8, pp. 31-35, 2009.
- Panton, R. L., Incompressible Flow, 2nd edition, John Wiley & Sons, New York, 1996.
- Choudhury, D., "Introduction to Renormalization Group Method and Turbulence Modeling," Technical Memorandum TM-107, Fluent Inc., 1993.
- Gupta, A. and Ranganathan, K., "Three-Dimensional Turbulent Swirling Flow in a Cylinder: Experiments and Computations," International Journal of Heat and Fluid Flow, Vol. 28, pp. 249-261, 2007. https://doi.org/10.1016/j.ijheatfluidflow.2006.04.005
- Wahal, S., Oztekin, A., Bornside, D. E., Brown, R. A., Seidel, P. K., Ackmann, P. W., and Geyling, F. T., "Visualization of a Gas Flow Instability in Spin Coating Systems," Applied Physics Letters, Vol. 62, pp. 2584-2586, 1993. https://doi.org/10.1063/1.109304
- Craster, R. V. and Matar, O. K., "Dynamics and Stability of Thin Liquid Films," Reviews of Modern Physics, Vol. 81, pp. 1131-1198, 2009. https://doi.org/10.1103/RevModPhys.81.1131