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Frequency Characteristics of 2-Layer Spiral Planar Inductor

2층 나선형 박막 인덕터의 주파수 특성

  • Kim, Jae-Wook (Department of Electronic Engineering, Namseoul University) ;
  • Ryu, Chang-Keun (Department of Electronic Engineering, Namseoul University)
  • Received : 2011.08.11
  • Accepted : 2011.09.08
  • Published : 2011.09.30

Abstract

In this study, we propose that the structures of 2-layer spiral planar inductors have a lower spiral coil and via increasing inductance in limited possession are and confirm the frequency characteristics. The structures of inductors have Si thickness of $300{\mu}m$, $SiO_2$ thickness of $7{\mu}m$. The width of Cu coils and the space between segments have $20{\mu}m$, respectively. The number of turns of coils have 3. The performance of spiral planar inductors was simulated to frequency characteristics for inductance, quality-factor, SRF(Self- Resonance Frequency) using HFSS. The 2-layer spiral planar inductors have inductance of 3.2nH over the frequency range of 0.8 to 1.8 GHz, quality-factor of maximum 8.2 at 2.5 GHz, SRF of 5.8 GHz. Otherwise, 1-layer spiral planar inductors have inductance of 1.5nH over the frequency range of 0.8 to 1.8 GHz, quality-factor of maximum 18 at 8 GHz, SRF of 19.2 GHz.

본 논문에서 기존 underpass와 via를 갖는 단층 나선형 박막 인덕터를 확장하여 제한된 점유면적 내에서 인덕턴스를 증가시킬 수 있는 하층 나선형 코일과 via를 갖는 2층 나선형 박막 인덕터의 구조를 제안하고 주파수 특성을 확인하였다. 인덕터의 구조는 Si를 $300{\mu}m$, $SiO_2$$7{\mu}m$으로 하였으며, Cu 코일의 폭과 선간의 간격은 각각 $20{\mu}m$으로 설정하여 3회 권선하였다. 나선형 박막 인덕터의 성능을 나타내는 인덕턴스, quality-factor, SRF에 대한 주파수 특성을 HFSS로 시뮬레이션 하였다. 2층 나선형 박막 인덕터는 0.8~1.8GHz 범위에서 3.2nH의 인덕턴스, 2.5GHz에서 최대 8.2 정도의 품질계수를 가지며, SRF는 5.8GHz로 시뮬레이션 결과를 얻었다. 반면에 단층 나선형 박막 인덕터는 0.8~1.8GHz 범위에서 1.5nH의 인덕턴스, 8GHz에서 최대 18 정도의 품질계수를 가지며, SRF는 19.2GHz로 시뮬레이션 결과를 얻을 수 있었다.

Keywords

References

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