한국레이저가공학회지 (Laser Solutions)
- 제14권2호
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- Pages.17-23
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- 2011
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- 1229-0963(pISSN)
펨토초 레이저 응용 선택적 어블레이션 연구
Selective Removal of Thin Film on Glass Using Femtosecond Laser
- Yu, J.Y. (Nano-machining Lab., KIMM) ;
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Cho, S.H.
(Nano-machining Lab., KIMM) ;
- Park, J.K. (Nano-machining Lab., KIMM) ;
- Yoon, J.W. (Nano-machining Lab., KIMM) ;
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Whang, K.R.
(Nano-machining Lab., KIMM) ;
- Sugioka, K. (Laser Technology Laboratory, RIKEN-Advance Science Institute) ;
- Hong, J.W. (Department of Mechanical Engineering, Auburn University) ;
- Heo, W.R. (Duckyu Co. Ltd.) ;
- Boehme, D. (JENOPTIK Korea Corporation Ltd.) ;
- Park, J.H. (JENOPTIK Korea Corporation Ltd.) ;
- Zander, S. (JENOPTIK Korea Corporation Ltd.)
- 투고 : 2011.04.05
- 심사 : 2011.06.21
- 발행 : 2011.06.30
초록
Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (
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