Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Electro-Optical Characteristics and Analysis of 1×1 mm2 Large-Area InGaN/GaN Green LED

1×1 mm2 대면적 녹색 LED의 전기 광학적 특성 분석

  • Jang, L.W. (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University) ;
  • Jo, D.S. (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University) ;
  • Jeon, J.W. (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University) ;
  • Ahn, Tae-Young (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University) ;
  • Park, M.J. (Department of Printed Electronics Engineering, Sunchon National University) ;
  • Ahn, B.J. (Department of Physics, Kongju National University) ;
  • Song, J.H. (Department of Physics, Kongju National University) ;
  • Kwak, J.S. (Department of Printed Electronics Engineering, Sunchon National University) ;
  • Kim, Jin-Soo (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University) ;
  • Lee, I.H. (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University) ;
  • Ahn, H.K. (School of Advanced Materials Engineering and Research Center of Advanced Materials Development, Chonbuk National University)
  • 장이운 (전북대학교 신소재공학부) ;
  • 조동섭 (전북대학교 신소재공학부) ;
  • 전주원 (전북대학교 신소재공학부) ;
  • 안태영 (전북대학교 신소재공학부) ;
  • 박민주 (순천대학교 인쇄전자공학과) ;
  • 안병준 (공주대학교 물리학과) ;
  • 송정훈 (공주대학교 물리학과) ;
  • 곽준섭 (순천대학교 인쇄전자공학과) ;
  • 김진수 (전북대학교 신소재공학부) ;
  • 이인환 (전북대학교 신소재공학부) ;
  • 안행근 (전북대학교 신소재공학부)
  • Received : 2011.05.30
  • Accepted : 2011.06.30
  • Published : 2011.07.30
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Abstract

We investigated the effects of piezoelectric field on the electro-absorption characteristics in InGaN/GaN multiple-quantum well (MQW) green light emitting diodes (LED). Double crystal X-ray diffraction measurement was performed to study the crystalline property and indium (In) composition in the MQW active layer. To measure the electro-luminescence and electro-reflectance (ER) spectroscopy, we fabricated the $1{\times}1\;mm^2$ large-area green LED chip. The piezoelectric field inside the LED structure was evaluated from the Vcomp in active layer by the ER spectra. Finally, we analyzed the electro-absorption characteristics of the green LED by using the photo-current spectroscopy.

본 논문은 InGaN/GaN 다중양자우물 구조를 가지는 녹색 발광다이오드의 활성층 내 인듐(In) 조성비와 piezoelectric field에 대한 전계 흡수 현상을 연구하였다. 활성층 내 결정학적 성질과 In 조성비는 double crystal X-ray diffraction 측정으로 분석하였으며, $1{\times}1\;mm^2$ 대면적 칩을 제작하여 발광특성을 조사하였다. 또한, 활성층 내 piezoelectric field는 electro-reflectance spectroscopy로부터 측정한 compensation voltage를 이용해 계산하였고, 인가전압에 따른 photocurrent의 변화를 측정함으로써 녹색 발광 소자의 전기 광학적 특성을 분석하였다.

Keywords

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